1966
DOI: 10.1063/1.1720217
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Indium Ion Source

Abstract: An ion source that utilizes a continuously oxygenated porous tungsten surface to generate indium ions is described. Indium vapor supplied to the back of the tungsten ionizer from a reservoir percolates through to the front surface where the indium is evaporated as ions. An accel-decel electrode extraction system is used to increase the ion current capability of the source. The ionizer and reservoir are designed to operate at temperatures in excess of 1000°C and at voltages up to 20 keV. The peak ion current at… Show more

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Cited by 22 publications
(1 citation statement)
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“…This source was operated up to about 20 kv with little change in the current above 3 kv. A special source was constructed and operated with reservoir and ionizer at > 1200~ to generate the required vapor pressure and ionize indium (22). Up to 0.5 ma of In + was obtained with the current being feedrate limited.…”
Section: Ion Sources 345cmentioning
confidence: 99%
“…This source was operated up to about 20 kv with little change in the current above 3 kv. A special source was constructed and operated with reservoir and ionizer at > 1200~ to generate the required vapor pressure and ionize indium (22). Up to 0.5 ma of In + was obtained with the current being feedrate limited.…”
Section: Ion Sources 345cmentioning
confidence: 99%