2002
DOI: 10.1002/1521-396x(200208)192:2<417::aid-pssa417>3.0.co;2-i
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Indium Segregation Kinetics in MOVPE of InGaN-Based Heterostructures

Abstract: General trends in In surface segregation during MOVPE of InGaN-based heterostructures are considered in terms of a rate-equation model. A parametric study of segregation effects is carried out with reference to a single GaN/InGaN/GaN quantum well. The theoretical predictions are compared with available observations.

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Cited by 25 publications
(10 citation statements)
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“…Finally the indium concentration in the upper part of the QW slowly decays, thus forming an indium tail which penetrates into the barrier indicating unintentional indium incorporation during the barrier growth. Such indium incorporation, attributed to indium surface segregation , has already been observed in (In,Ga)(As,N) systems grown by molecular beam epitaxy (MBE) , and also in MOVPE grown structures . It should be noted that for 2T samples the compositional profiles were averaged across regions of QWs with identical thicknesses and only the indium tail at the upper interface has been recorded.…”
Section: Resultsmentioning
confidence: 71%
See 1 more Smart Citation
“…Finally the indium concentration in the upper part of the QW slowly decays, thus forming an indium tail which penetrates into the barrier indicating unintentional indium incorporation during the barrier growth. Such indium incorporation, attributed to indium surface segregation , has already been observed in (In,Ga)(As,N) systems grown by molecular beam epitaxy (MBE) , and also in MOVPE grown structures . It should be noted that for 2T samples the compositional profiles were averaged across regions of QWs with identical thicknesses and only the indium tail at the upper interface has been recorded.…”
Section: Resultsmentioning
confidence: 71%
“…One can see that the indium penetration into the barrier decreases from sample 1T, Q2T, ∼Q2T to 2T indicating that a correlation may exist with the thickness of the low temperature GaN cap layer grown on top of the QW. Computations by Karpov et al using a rate‐equation model which allowed an unsteady‐state simulation of indium adatom segregation effects under time‐dependent conditions demonstrated the formation of a compositional tail at the QW top interface . Their model suggests that when the temperature in the reactor increases the surface coverage of indium decreases.…”
Section: Resultsmentioning
confidence: 99%
“…19,20 Raman scattering measurements have been carried out at room temperature to study the In-rich clusters in these near-UV MQWs samples. The inset of Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Despite the great success in InGaN-based blue-light LEDs [1,8,15,20,21], high-efficiency green-light LEDs with a high In concentration is still challenging, especially in organometallic vapor phase epitaxy (OMVPE). Due to the large bond length difference between GaN and InN, segregated In ad-layers or In rich islands on the surface are often observed in the OMVPE growth of InGaN [8,[22][23][24]. Such large size mismatch may also lead to spinodal decomposition, resulting in a large miscibility gap and a limited In concentration in InGaN [14].…”
Section: Introductionmentioning
confidence: 99%