Indium tin oxide thin films for metallization in microelectronic devices

Venkatesan, M.; McGee, Susan; Mitra, U.

doi:10.1016/0040-6090(89)90719-0

Cited by 33 publications

(15 citation statements)

References 14 publications

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“…It should be noted that magnetron sputtering is an effective method for producing all transparent electrodes [12,13]. This is due to the high degree of accuracy of transferring the target composition to the substrate, reproducibility and controllability of the magnetron sputtering process [14,15].…”

Section: Materials For the Creation And Methods Of Investigation Of Fmentioning

confidence: 99%

Investigation of Photoelectric Converters With a Base Cadmium Telluride Layer With a Decrease in Its Thickness for Tandem and Two-Sided Sensitive Instrument Structures

Deyneko

Kryvulkin

Matiushenko

et al. 2019

EUREKA: Physics and Engineering

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Photovoltaic cells with a base layer of cadmium telluride with a decrease in its thickness are studied. It is known that the widespread use of photovoltaic converters is constrained by their high price in the case of highly efficient instrument structures, or low efficiency. The creation of tandem and two-sided sensitive photoelectric converters will reduce their cost while increasing their efficiency. However, to create tandem and two-sided sensitive photoelectric converters, the necessary conditions are the use of transparent contacts and a decrease in the thickness of the base layer for efficient absorption of incident radiation by the converter, which is lower. In the research process, it was found that reducing the thickness of the base layer to 1 μm allows to increase the efficiency of the photoelectric transducer during irradiation from the back. An increase in the efficiency of the photoelectric converter occurs due to a decrease in the distance from the generation region of nonequilibrium charge carriers in the region of separation. If the thickness of the base layer is less than 1 μm, then regardless of which side of the irradiation is carried out, a decrease in the efficiency of the instrument structure is observed. Increase in the efficiency of photoconverters is associated with an increase in the negative influence of recombination processes on the back contact, a decrease in the number of charge carriers generated due to incomplete absorption of incident radiation, and a decrease in the volume of the built-in field of the separating barrier when it overlaps with the depletion region of the back contact. ITO/CdS/CdTe/Cu/ITO SCs with a base layer thickness of 1 μm demonstrates degradation stability. The highest value of efficiency in the case of illumination from the front side 8.1 % and with illumination from the back side 3.8 % received after a year of operation of the photovoltaic converter.

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Section: Materials For the Creation And Methods Of Investigation Of Fmentioning

confidence: 99%

Investigation of Photoelectric Converters With a Base Cadmium Telluride Layer With a Decrease in Its Thickness for Tandem and Two-Sided Sensitive Instrument Structures

Deyneko

Kryvulkin

Matiushenko

et al. 2019

EUREKA: Physics and Engineering

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“…Annealing 2 at 500ЊC resulted in moderate increases in resistivity for the two ambients, thus revealing that the 400ЊC anneal in forming gas resulted in a minimum resistivity of 0.6 = 10 y3 ⍀ и cm. An observation with an optical microscope shows that the samples annealed in N gas, at 360 and 400ЊC, are crackled, 2 which explains the obtained bad resistivity. The same phenomenon is observed for the samples heat treated at 500ЊC in both ambients.…”

Section: Resisti¨ity Of the Ito Filmsmentioning

confidence: 99%

Microwave planar antenna with RF-sputtered indium tin oxide films

Outaleb

Pinel

Drissi

et al. 2000

Microw. Opt. Technol. Lett.

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“…It should be noted that the magnetron sputtering is one of the most promising methods for obtaining all transparent electrodes [9,10]. This is due to the high degree of accuracy in transferring the composition of the target on the substrate, to the reproducibility and manageability of the magnetron sputtering process [11,12]. Since it is not possible, without a layer of copper, to obtain effective instrument structures, we deposited, before applying ITO on the surface of cadmium telluride, a nanodimensional layer of copper with a thickness of 2 nm.…”

Section: Materials and Equipment Used For Obtaining The Photoelectmentioning

confidence: 99%

Results of studying the Cu/ITO transparent back contacts for solar cells SnO2:F/CdS/CdTe/Cu/ITO

Deyneko

Semkiv

Soshinsky

et al. 2018

EEJET

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Indium tin oxide thin films for metallization in microelectronic devices

Cited by 33 publications

References 14 publications

Investigation of Photoelectric Converters With a Base Cadmium Telluride Layer With a Decrease in Its Thickness for Tandem and Two-Sided Sensitive Instrument Structures

Investigation of Photoelectric Converters With a Base Cadmium Telluride Layer With a Decrease in Its Thickness for Tandem and Two-Sided Sensitive Instrument Structures

Microwave planar antenna with RF-sputtered indium tin oxide films

Results of studying the Cu/ITO transparent back contacts for solar cells SnO2:F/CdS/CdTe/Cu/ITO

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