2003
DOI: 10.1116/1.1572164
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Individual free-standing carbon nanofibers addressable on the 50 nm scale

Abstract: Fabrication of gated cathode structures using an in situ grown vertically aligned carbon nanofiber as a field emission elementWe report on the fabrication of arrays of free-standing carbon nanofibers ͑CNFs͒ individually addressable on the 50 nm scale. The template for CNF growth consists of a set of tungsten leads patterned with a catalyst dot at the tip of each terminal. The fabrication process involves electron-beam lithography, projection photolithography, reactive ion etching, and dc plasma-enhanced chemic… Show more

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Cited by 14 publications
(7 citation statements)
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“…Due to this considerable level of control during the synthesis process, the technology of VACNF synthesis has matured to the point that it can be used as a standard processing step in complex device fabrication. 15,[22][23][24][25][26][27] Yet true controlled synthesis has not been demonstrated as command of the internal graphitic structure of the nanofibers, which controls mechanical strength, electron transport, and surface chemistry, has remained elusive. In catalytic thermal CVD processes, the structure and properties of the fibers can be influenced by a number of factors, including the nature of the metal surface, the composition of the gas-phase reactant, the temperature, and the incorporation of either gas phase or solid additive.…”
Section: Introductionmentioning
confidence: 99%
“…Due to this considerable level of control during the synthesis process, the technology of VACNF synthesis has matured to the point that it can be used as a standard processing step in complex device fabrication. 15,[22][23][24][25][26][27] Yet true controlled synthesis has not been demonstrated as command of the internal graphitic structure of the nanofibers, which controls mechanical strength, electron transport, and surface chemistry, has remained elusive. In catalytic thermal CVD processes, the structure and properties of the fibers can be influenced by a number of factors, including the nature of the metal surface, the composition of the gas-phase reactant, the temperature, and the incorporation of either gas phase or solid additive.…”
Section: Introductionmentioning
confidence: 99%
“…Catalytically synthesized nanofibers may be deterministically grown in a vertical orientation on a variety of substrates and feature nanoscale tip geometries and lengths of up to several tens of microns. The fiber growth process can be employed as an integral step in device microfabrication, thereby enabling the realization of complex multilevel devices that feature very high aspect ratio, nonplanar electrodes. , Previously, we and others have documented the fabrication of individually addressable nanofiber electrodes, and several groups have documented aspects of the electrochemical performance of regions of nanofiber forests , and sparse arrays of nanofibers .…”
Section: Introductionmentioning
confidence: 99%
“…The MWNTs used for the majority of electrical measurements reported in the literature have been fabricated by arc discharge (A-MWNT), and such nanotubes are known to have a much lower defect density than carbon nanotubes fabricated with chemical vapor deposition (CVD), C-MWNT, which are typically regarded as diffusive conductors. , Defects can be of a variety of types, such as pentagon−heptagon pairs (Stone-Walls defect), vacancies and domains of graphite, corrugations, bamboo-like walls, and residues of catalysis particles . However, from a practical perspective, the C-MWNTs are interesting, since they can easily be integrated in microsystems by methods such as CVD or plasma-enhanced CVD (PECVD) from prepositioned catalytic particles, while A-MWNTs needs to be integrated into microsystems from liquid dispersions of the nanotube powder or by similar methods with little control over the placement of the individual nanotube. Despite the high defect density, C-MWNTs are also promising for electrical devices and have been shown to sustain high current densities above 10 7 A/cm 2 .…”
mentioning
confidence: 99%