Experimental investigations of -hydrogen elimination from alkoxy and alkyl groups bound to a Cu(111) surface have been coupled with computational studies of gas-phase analogues to provide insight into the transition state for catalytic hydrogenation and dehydrogenation on metal surfaces. Previous studies have shown that fluorination increases the activation barrier (∆E act ) to -hydrogen elimination in ethoxy groups (RCH 2 O (ad) f RCHdO (ad) + H (ad) , where R ) CH 3 , CFH 2 , CHF 2 , CF 3 ) and propyl groups (RCH 2 CH 2,(ad) f RCHdCH 2,(ad) + H (ad) , where R ) CH 3 , CF 3 ) on the Cu(111) surface. The increase in barrier height with increasing fluorination was attributed to the inductive influence of fluorine, which energetically destabilizes a hydride-like transition state of the form [RC δ+ ‚‚‚H δ-] ‡ . In this paper, deuterium kinetic isotope effects (DKIE) show that fluorination does not alter the mechanism for -hydrogen elimination from ethoxy groups. Furthermore, the DKIE measurements confirm that the effects of fluorine on the kinetics of -hydrogen elimination do not result from the change in mass when hydrogen is substituted by fluorine. A systematic study of fluorine substitution of surface-bound isopropoxy groups reveals combined steric and electronic effects. An excellent correlation is found between the ∆E act for -hydrogen elimination in adsorbed alkoxy groups and the calculated reaction energetics (∆H rxn ) for gas-phase dehydrogenation of fluorinated alcohols in trans antiperiplanar conformations (e.g., RCH 2 OH (g) f RCHdO (g) + H 2,(g) , where the hydroxyl hydrogen is antiperiplanar to a carbon and the oxygen is antiperiplanar to a fluorine). Hammett plots for -hydrogen elimination give a reaction parameter of F ) -26. These correlations both suggest that the transition state for -hydrogen elimination develops a greater partial positive charge on the carbinol carbon than is found in the adsorbed reactant. Furthermore, the transition state is energetically late in the reaction coordinate for -hydrogen elimination.