2015
DOI: 10.1088/1674-1056/24/9/096804
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Influence of a deep-level-defect band formed in a heavily Mg-doped GaN contact layer on the Ni/Au contact to p-GaN

Abstract: Influence of a deep-level-defect band formed in a heavily Mg-doped GaN contact layer on the Ni/Au contact to p-GaN * Li Xiao-Jing(李晓静) a) , Zhao De-Gang(赵德刚) a) † , Jiang De-Sheng(江德生) a) , Chen Ping(陈 平) a) , Zhu Jian-Jun(朱建军) a) , Liu Zong-Shun(刘宗顺) a) , Le Ling-Cong(乐伶聪) a) , Yang Jing(杨 静) a) , He Xiao-Guang(何晓光) a) , Zhang Li-Qun(张立群) b) , Liu Jian-Ping(刘建平), Zhang Shu-Ming(张书明) b) , and Yang Hui(杨 辉) a)b) a) State

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Cited by 4 publications
(3 citation statements)
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“…A sufficient total p‐GaN thickness is required to accommodate a very highly doped cap layer with a high density of dopants that will provide barrier lowering and thus reducing the specific contact resistivity. However, increasing the thickness further causes poor material quality and dislocations and difficulty in carrier transport that increases the resistivity . Two representative samples of p‐GaN growth temperature of 850 °C (sample A) and 1000 °C (sample B) both of 200 nm total thickness were analysed by SEM and AFM to investigate the surface morphology.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…A sufficient total p‐GaN thickness is required to accommodate a very highly doped cap layer with a high density of dopants that will provide barrier lowering and thus reducing the specific contact resistivity. However, increasing the thickness further causes poor material quality and dislocations and difficulty in carrier transport that increases the resistivity . Two representative samples of p‐GaN growth temperature of 850 °C (sample A) and 1000 °C (sample B) both of 200 nm total thickness were analysed by SEM and AFM to investigate the surface morphology.…”
Section: Resultsmentioning
confidence: 99%
“…As we discuss later, this high Mg concentration helps to vanish the band bending in the cap layer but is probably too high in the moderate layer for obtaining higher mobility values and hence lower p‐GaN resistivity. Even though the high temperature grown sample shows better crystal quality, to avoid thermal load to the MQW underneath , we need to limit the growth temperature of p‐GaN which is the reason that we chose 850 °C as a good compromise.…”
Section: Resultsmentioning
confidence: 99%
“…Specific contact resistance ρ c and sheet resistance R SH were carried out through CTLM method. [21] The sheet resistance R SH can be calculated via following formula:…”
Section: Electrical Properties Variations Of P-gan and N-gan Under Hi...mentioning
confidence: 99%