2002
DOI: 10.1063/1.1423768
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Influence of average size and interface passivation on the spectral emission of Si nanocrystals embedded in SiO2

Abstract: The correlation between the structural ͑average size and density͒ and optoelectronic properties ͓band gap and photoluminescence ͑PL͔͒ of Si nanocrystals embedded in SiO 2 is among the essential factors in understanding their emission mechanism. This correlation has been difficult to establish in the past due to the lack of reliable methods for measuring the size distribution of nanocrystals from electron microscopy, mainly because of the insufficient contrast between Si and SiO 2 . With this aim, we have recen… Show more

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Cited by 260 publications
(70 citation statements)
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“…11,12 Annealing of the layers at low temperature (400 C) under N 2 allows a partial recovering of the implantation damage even if the total recovering of a stoichiometric SiO 2 needs higher temperature. 34 This annealing step is sufficient to avoid, or at the minimum, to retard the penetration of Orich complexes and therefore the oxidation process, without modifying the particle population. In addition, Ag 2 O is not stable and decomposes into Ag and oxygen at temperature T > 194 C. For this reason, there is no particle oxidation during this annealing and only matrix healing.…”
Section: Discussionmentioning
confidence: 99%
“…11,12 Annealing of the layers at low temperature (400 C) under N 2 allows a partial recovering of the implantation damage even if the total recovering of a stoichiometric SiO 2 needs higher temperature. 34 This annealing step is sufficient to avoid, or at the minimum, to retard the penetration of Orich complexes and therefore the oxidation process, without modifying the particle population. In addition, Ag 2 O is not stable and decomposes into Ag and oxygen at temperature T > 194 C. For this reason, there is no particle oxidation during this annealing and only matrix healing.…”
Section: Discussionmentioning
confidence: 99%
“…3͑b͒ reveal that the peak wavelength, an indication of the Si-nc size, does not change significantly beyond 2 min of annealing. Garrido Fernandez et al 20 . The apparent blueshift in the peak PL wavelength from 10 s to 2 min for the 20% excess silicon is due to the progressive increase in detector noise above 800 nm, which skews the peak PL wavelength to a higher value for very low intensity samples.…”
Section: B Ostwald Ripening Process and Si-nc Sizementioning
confidence: 99%
“…The light‐emitting centers have been suggested to contain non‐bridging oxygen (SiO) 12. Si‐nc in silica can be produced by annealing of silicon‐rich silicon oxide SiO x ( x < 2) prepared by plasma enhanced chemical vapor deposition (PECVD) 9, 13–15, magnetron sputtering 13, 14, molecular beam deposition (MBD) 10, 11, 16, 17, and Si‐ion implantation 4, 18. The optical and structural properties of SiO x films prepared by PECVD and magnetron sputtering have recently been compared 13, 14.…”
Section: Introductionmentioning
confidence: 99%