We theoretically investigate the combining efficiency and combined beam quality degradation induced by beam array misalignment in a coherent combining system based on diffractive optical elements. Theoretical model is established based on the Fresnel diffraction. We consider pointing aberration, positioning error and beam size deviation in array emitters as typical misalignments, and discuss their influences on beam combining by this model. The statistical analysis results and the accurate fitting curves of the degradation have been given based on the repetitive simulations with normal distributed random misalignments. According to the results, the combining efficiency is affected greatly by the pointing aberration and position error of the laser array, while the combined beam quality is just affected by the pointing aberration generally. Based on calculation with a series of typical parameters, the standard deviations of the laser array’s pointing aberration and position error are required to less than 15μrad and 1μm respectively to maintain an excellent combining efficiency. If we only concentrate on the beam quality, the pointing aberration need to be less than 70μrad.