Influence of composition and structural properties in the tribological behaviour of magnetron sputtered Ti–Si–C nanostructured thin films, prepared at low temperature

Abstract

Please cite this article in press as: D. Munteanu, et al., Influence of composition and structural properties in the tribological behaviour of magnetron sputtered Ti-Si-C nanostructured thin films, prepared at low temperature, Wear (2009),

Tribological behavior of selected Mn+1AXn phase thin films on silicon substrates

“…6a, this "running-in" behavior can be attributed to the formation of a film on the ball surface, which consists of titanium, silicon and carbon. This film can act as a solid lubricant as already shown by other authors [33,38]. The corresponding friction coefficient-distance curves for the Ti 3 SiC 2 film obtained after annealing, can be seen in Fig.…”

High-rate deposition of amorphous and nanocomposite Ti–Si–C multifunctional coatings

“…TiC-based nanocomposite coatings are well known from tribological applications [5,6,7,8,9,10], but have only recently been adopted for electrical contacts [ 11,12,13,14,15 ]. Ti-Si-C based nanocomposites are particularly relevant, since these nanocomposites have been demonstrated to combine their known mechanical strength and low coefficient of friction [9,16,17,18,19,20,21] with high conductivity and low contact resistance [11,15]. This far, mainly laboratory scale sputtering of Ti-Si-C nanocomposites has been performed [11,15,16,17,18,19,20,21].…”

Si incorporation in Ti1−xSixN films grown on TiN(001) and (001)-faceted TiN(111) columns

“…3 applications as wear-resistant coatings on, for example, cutting tools and automotive components, typically consist of transition-metal nitride [11,12,13,14,15,16,17,18,19], carbide [20,21,22,23,24,25], or boride [26,27,28,29,30] nanocrystals encapsulated by a few ML of a covalent interfacial layer (e.g., Si 3 N 4 , SiC, BN, CN x , or C).…”