Please cite this article in press as: D. Munteanu, et al., Influence of composition and structural properties in the tribological behaviour of magnetron sputtered Ti-Si-C nanostructured thin films, prepared at low temperature, Wear (2009),

Ti(C, O, N) thin films were prepared by magnetron sputtering and analysed in terms of their tribological properties. Surface and tribological parameters were analysed and discussed as a function of the films composition and structural features, as well as their thickness. The evolution of friction coefficient values was in concordance with the wear behaviour of the films. According to the atomic composition of the films, an increasing of the carbon percentage and a compound chemical formula closed to the stoichiometric TiC lead to a very good wear behaviour. This aspect is also directly correlated with the friction behaviour.