Influence of deposition parameters on preferred orientation of RF magnetron sputtered BST thin films

Li, Songzhan; Yang, Yanqin; Liu, L.; Zhang, T. J.; Huang, Wei‐Hao

doi:10.1007/s10854-007-9270-0

Cited by 6 publications

(4 citation statements)

References 15 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…Owing to their multifunctional electro-optical properties, ferroelectric perovskite thin films are attractive materials for a wide range of applications including, decoupling capacitors, infrared detectors, and microwave tunable devices, such as phase shifters, resonators, and filters [1][2][3][4][5]. Among the ferroelectric materials family, BaSrTiO x (BST) thin films recently received significant attention due to their potential for high performance electronic devices due to the superior tunability, low loss, room temperature (RT) operation, and additionally being lead-free tunable perovskite [6][7][8].…”

Section: Introductionmentioning

confidence: 99%

“…It is well known that film characteristics are strongly affected by the growth parameters such as substrate temperature, oxygen pressure and annealing [7,9,10,19]. Numerous studies on BST thin films have been reported in the recent years, however these efforts mainly concentrated on the determination of a single physical property (i.e., either the structural, optical, or electrical properties) [18][19][20][21][22].…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Structural, optical and electrical characteristics BaSrTiOx thin films: Effect of deposition pressure and annealing

Bayrak

Özgit-Akgün

Goldenberg

2017

Journal of Non-Crystalline Solids

View full text Add to dashboard Cite

Among perovskite oxide materials, BaSrTiO x (BST) has attracted great attention due to its potential applications in oxide-based electronics. However, reliability and efficiency of BST thin films strongly depend on the precise knowledge of the film microstructure, as well as optical and electrical properties. In the present work, BST films were deposited at room temperature using radio frequency magnetron sputtering technique. The impact of deposition pressure, partial oxygen flow, and post-deposition annealing treatment on film microstructure, surface morphology, refractive index, and dielectric constants were studied by X-ray diffraction, scanning electron microscopy, spectrophotometry, ellipsometry, photoluminescence, as well as capacitance-voltage measurements. Well-adhered and uniform amorphous films were obtained at room temperature. For all as-deposited films, the average optical transmission was~85% in the VIS-NIR spectrum. The refractive indices of BST films were in the range of 1.90-2.07 (λ = 550 nm). Post-deposition annealing at 800°C for 1 h resulted in polycrystalline thin films with increased refractive indices and dielectric constants, however reduced optical transmission values. Frequency dependent dielectric constants were found to be in the range of 46-72. However, the observed leakage current was relatively small, about 1 μA. The highest FOM values were obtained for films deposited at 0.67 Pa pressures, while charge storage capacity values increased with increased deposition pressure. Results show that room-temperature grown BST films have potential for device applications.

show abstract

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Structural, optical and electrical characteristics BaSrTiOx thin films: Effect of deposition pressure and annealing

Bayrak

Özgit-Akgün

Goldenberg

2017

Journal of Non-Crystalline Solids

View full text Add to dashboard Cite

show abstract

“…Li. et al [48] deposited Ba 0.65 Sr 0.35 TiO 3 (BST) films and observed significant changes in film properties with variation in deposition pressure. It was deduced that the orientation of the deposited thin film could be tailored by adjusting the sputtering pressure.…”

mentioning

confidence: 99%

Fabrication of ᵞ-In₂Se₃-Based Photodetector Using RF Magnetron Sputtering and Investigations of Its Temperature-Dependent Properties

Hase

Sharma

Prasad³

et al. 2023

IEEE Sensors J.

View full text Add to dashboard Cite

Metal chalcogenide indium selenide (In2Se3) is attracting increasing research interest for photodetector applications due to its excellent photoresponse and superior stability under ambient conditions. However, the temperature-dependent performance of In2Se3-based photodetectors has rarely been reported. Here, -In2Se3 thin films were prepared at various deposition pressure using the RF magnetron sputtering for photodetector applications. The formation of single-phase -In2Se3 films has been confirmed by the XRD and Raman analysis. Binding energies and elemental composition of -In2Se3 films were examined by XPS analysis. FE-SEM images show that the prepared -In2Se3 films were crack and pore-free, dense, compact, smooth, and have small grains. The optical energy bandgap decreases from 2.2 eV to 1.7 eV with an increase in deposition pressure. Then photoresponse of -In2Se3-based photodetectors was investigated. The photodetector fabricated with -In2Se3 at 5 Pa on ITO-coated interdigital electrode (IDE) exhibited excellent photoresponsivity (2.82 µA/W) and detectivity (7.06x10 7 Jones) with a fast rise of 0.26 s and decay time of 0.32 s. Finally, the temperature-dependent photoresponse of the photodetector fabricated with -In2Se3 at 5 Pa is meticulously investigated. We found that the photodetector properties of a photodetector critically depend on the operating temperature.

show abstract

“…Fonte: Autor Tabela 6 -Cálculo do tamanho de cristalito em função da potência de rf, da relação oxigênio argônio e da temperatura de deposição para filmes finos de BST depositados sobre Si. Diversas referências bibliográficas reportam o aumento da cristalinidade dos filmes de BST com o aumento da temperatura de deposição (HORIKAWA et al, 1993); (LI et al, 2007). Em resumo foi observado que o aumento tanto da temperatura de deposição quanto da potência de rf levaram a uma melhora da cristalinidade dos filmes, ou seja, o aumento da energia associada ao processo de deposição melhora a cristalinidade dos filmes.…”

Section: unclassified

Deposição e caracterização de filmes de titanato de estrôncio e bário (Ba0,5Sr0,5(TiO3)) visando a sua utilização na fabricação de defasadores variáveis operando em 60 GHZ.

Pelegrini¹

View full text Add to dashboard Cite

À minha maravilhosa esposa Fernanda M. Pelegrini pelas inúmeras gargalhadas que consegue dar mesmo nos momentos mais difíceis. Aos meus amados pais Reynaldo Pelegrini e Solidea Ap. Pelegrini, aos meus irmãos Marcelo e Eduardo Pelegrini, aos meus sobrinhos Natalia, Paulo Henrique, Luis Gustavo, Valentina e Giovana por serem parte tão importante a minha vida. À minha querida orientadora, professora Inés Pereyra, pela orientação, estímulo e principalmente pelas inúmeras discussões, que muito me auxiliaram no crescimento pessoal e profissional obtido durante meu doutorado.

show abstract

Influence of deposition parameters on preferred orientation of RF magnetron sputtered BST thin films

Cited by 6 publications

References 15 publications

Structural, optical and electrical characteristics BaSrTiOx thin films: Effect of deposition pressure and annealing

Structural, optical and electrical characteristics BaSrTiOx thin films: Effect of deposition pressure and annealing

Fabrication of ᵞ-In₂Se₃-Based Photodetector Using RF Magnetron Sputtering and Investigations of Its Temperature-Dependent Properties

Deposição e caracterização de filmes de titanato de estrôncio e bário (Ba<sub>0,5</sub>Sr<sub>0,5</sub>(TiO<sub>3</sub>)) visando a sua utilização na fabricação de defasadores variáveis operando em 60 GHZ.

Contact Info

Product

Resources

About