Influence of discharge parameters on the resultant sputtered crater shapes for a radio frequency glow discharge mass spectrometry source

Gibeau, Terri E.; Marcus, R. Kenneth

doi:10.1039/a803894e

Cited by 21 publications

(15 citation statements)

References 28 publications

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“…Figure 4 indicated that the signal intensities were increased when the rf power was in the range of 10−50 W. The increase of rf power could increase both the ion densities and their kinetic energy since the negative selfbiased potential is increased. 8,26 This would further result in improved sputtering and ionization efficiency. With the addition of magnetic field, the ion trajectory was bent and the plasma density would be further increased.…”

Section: Optimization Of Parameters For Signal Enhancement Of the Stamentioning

confidence: 99%

“…By increasing the discharge pressure, the plasma density would increase, while the increase of the magnetic field strength could increase the sputter efficiency, since more ions could be produced. 8,22 When the discharge pressure was above 6.7 mPa, poor vacuum, some interferences, or redeposition might be caused. 24 The rf-power dependence of the magnetic enhancement was studied using Y2O3, BSO, and BTN samples with rfpower in the range from 10 to 50 W under the discharge pressure of 5.3 mPa.…”

Section: Optimization Of Parameters For Signal Enhancement Of the Stamentioning

confidence: 99%

“…1 Particularly, the rf-GD-MS has offered efficient depth profile analysis of different materials, such as glass, ceramics and new composite materials, thus widening its applications. [2][3][4][5][6][7][8][9][10][11][12][13] Generally, the principles of rf glow discharge is similar to direct current glow discharge in many respects. However, as an AC potential is applied in an rf-GD process, electrical insulating samples can be effectively sputtered.…”

Section: Introductionmentioning

confidence: 99%

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Signal Enhancement with Stacked Magnets for High-Resolution Radio Frequency Glow Discharge Mass Spectrometry

et al. 2017

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ABSTRACT:A method for signal enhancement utilizing stacked magnets was introduced into high-resolution radio frequency glow discharge-mass spectrometry (rf-GD-MS) for significantly improved analysis of inorganic materials. Compared to the block magnet, the stacked magnets method was able to achieve 50−59% signal enhancement for typical elements in Y2O3, BSO, and BTN samples. The results indicated that signal was enhanced as the increase of discharge pressure from 1.3 to 8.0 mPa, the increase of rf-power from 10 to 50 W with a frequency of 13.56 MHz, the decrease of sample thickness, and the increase of number of stacked magnets. The possible mechanism for the signal enhancement was further probed using the software "Mechanical APDL (ANSYS) 14.0". It was found that the distinct oscillated magnetic field distribution from the stacked magnets was responsible for signal enhancement, which could extend the movement trajectories of electrons and increase the collisions between the electrons and neutral particles to increase the ionization efficiency. Two NIST samples were used for the validation of the method, and the results suggested that relative errors were within 13% and detection limit for six transverse stacked magnets could reach as low as 0.0082 μg g −1 . Additionally, the stability of the method was also studied. RSD within 15% of the elements in three nonconducting samples could be obtained during the sputtering process. Together, the results showed that the signal enhancement method with stacked magnets could offer great promises in providing a sensitive, stable, and facile solution for analyzing the nonconducting materials.

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Section: Optimization Of Parameters For Signal Enhancement Of the Stamentioning

confidence: 99%

Section: Optimization Of Parameters For Signal Enhancement Of the Stamentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Signal Enhancement with Stacked Magnets for High-Resolution Radio Frequency Glow Discharge Mass Spectrometry

et al. 2017

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“…In addition, Gibeau and Marcus reported further investigations [119] on the influence of discharge operation conditions, for example rf power, gas pressure, and anode diameter, on the depth-resolving capabilities of rf-GD-MS, both for metallic and insulating samples. Depth profiles of different samples such as a simulated mirror, a superlattice material, and a painted automotive panel were also obtained by use of this system [119].…”

Section: Rf-gd-(fourier Transform) Msmentioning

confidence: 98%

“…Depth profiles of different samples such as a simulated mirror, a superlattice material, and a painted automotive panel were also obtained by use of this system [119].…”

Section: Rf-gd-(fourier Transform) Msmentioning

confidence: 99%

Radiofrequency glow-discharge devices for direct solid analysis

Pisonero

Costa

Pereiro

et al. 2004

Analytical and Bioanalytical Chemistry

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The enormous potential of radiofrequency glow discharges (rf-GD) as photon, atom, or ion sources, coupled to spectrometric techniques, for rapid direct analysis of almost any conductor, semiconductor, or insulating material with good in-depth resolution has been demonstrated world-wide. This outstanding performance has prompted a great effort to develop and characterise rf-GD for direct materials analysis in recent years. The state of the art of rf-GD coupled to atomic absorption spectrometry, optical emission spectrometry, and mass spectrometry for direct solid analysis is reviewed here. A description of the principles of operation of the rf-GD and attempts to model these discharges are also given. Rf-GD instrumentation, both developed at research laboratories and commercially available, is described. Several practical examples are given demonstrating the capabilities of these techniques for bulk and depth-profile analysis. Finally, the research gaps to be filled for full implementation of rf-GD spectrometric techniques in industry and research centres alike for materials science studies and technical development are discussed.

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Characterization of bis-(phenoxy)phosphazene polymers using radio frequency glow discharge mass spectrometry

Gibeau

Marcus

2000

J. Appl. Polym. Sci.

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A radio frequency glow discharge mass spectrometry (rf-GDMS) source is evaluated for future applications in the "fingerprint" characterization of polyphosphazene membranes. The rf-GDMS spectra of a series of bis(phenoxy)phosphazene polymers contain ions that originate from both the phosphazene backbone and the phenoxy moiety, resulting in signature ions of the polymer family. "Fingerprint" ions from the substituted R-group on the phenoxy moiety of the different derivatives allows the individual polymers to be distinguished from one another. The ability of the rf-GDMS source to characterize these materials directly in the solid state will be useful for the continued application of these polymers as separation membranes.

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Influence of discharge parameters on the resultant sputtered crater shapes for a radio frequency glow discharge mass spectrometry source

Cited by 21 publications

References 28 publications

Signal Enhancement with Stacked Magnets for High-Resolution Radio Frequency Glow Discharge Mass Spectrometry

Signal Enhancement with Stacked Magnets for High-Resolution Radio Frequency Glow Discharge Mass Spectrometry

Radiofrequency glow-discharge devices for direct solid analysis

Characterization of bis-(phenoxy)phosphazene polymers using radio frequency glow discharge mass spectrometry

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