Studies on InGaN multiple quantum well blue-violet laser diodes have been reported. Laser structures with long-period multiple quantum wells were grown by metal-organic chemical vapor deposition. Triple-axis X-ray diffraction (TAXRD) measurements show that the multiple quantum wells were high quality. Ridge waveguide laser diodes were fabricated with cleaved facet mirrors. The laser diodes lase at room temperature under a pulsed current. A threshold current density of 3.3 kA/cm 2 and a characteristic temperature T 0 of 145 K were observed for the laser diode.Keywords: metalorganic chemical vapor deposition (MOCVD), GaN-based laser diodes, multiple quantum well, ridge waveguide, threshold current.Since the demonstration of the first InGaN multiple quantum well laser diode (LD) [1] , GaN-based multiple quantum well laser diodes have attracted a great deal of attention due to their potential applications in high-density optical storage, display, laser printing, and lighting. Many universities and companies have been focusing their research on nitride semiconductors in recent years. Remarkable progress has been achieved in GaN template growth, n-type and p-type doping of GaN, InGaN/GaN multiple quantum well (MQW) growth [2,3] , and AlGaN growth and doping [4,5] . Meanwhile, the techniques for making ohmic contact to n-type and p-type GaN and for the cleaving of wurtzite GaN on sapphire have developed rapidly [6][7][8] . Although several groups have reported the pulsed and continuous-wave operation of InGaN MQW laser diodes at room temperature [9][10][11][12][13] , the growth and fabrication of GaN-based LDs are still challenging, and more research is needed. There are several factors that influence the characteristics of such LDs, but the quality of the MQW plays a dominant role in the improvement of the LDs. By the sys-728 Science in China Series E: Technological Sciences tematic optimization of the MQWs, it is found that MQWs with a longer period have better photoluminescence characteristics [14] . We have realized an LD structure with this kind of MQW, and here we report our results.
ExperimentalThe GaN materials and laser structures were grown in a closed-space showerhead metalorganic chemical vapor deposition (MOCVD) reactor. (0001) C-face sapphire was used as substrate. The MQW LDs consisted of a 20 nm-thick GaN buffer layer grown at the low temperature of 550℃, a 5 μm-thick GaN:Si layer, a 0.7 μm-thick Al 0.25 Ga 0.75 N/ GaN:Si superlattice (SL), a 0.1 μm-thick GaN:Si layer, an In 0.15 Ga 0.85 N/In 0.02 Ga 0.98 N MQW structure consisting of five 3 nm-thick undoped In 0.15 Ga 0.85 N well layers separated by 25 nm-thick Si-doped In 0.02 Ga 0.98 N barrier layers, a 20 nm Al 0.2 Ga 0.8 N:Mg layer, a 0.1 μm GaN:Mg layer, a 0.65 μm AL 0.2 Ga 0.8 N/GaN:Mg SL, and a 0.2 μm GaN:Mg layer.The 20 nm Al 0.2 Ga 0.8 N layer served as a blocking layer to prevent electrons from escaping from the active region. The 0.1 μm n-type and p-type GaN layers were light-guiding layers. The 0.7 μm n-type and 0.65 μm p-type AlGaN/GaN SLs ...