Influence of fabrication tolerances on performance characteristics of a MEMS gyroscope

Biswas, Arnab; Pawar, V. S.; Menon, P. Krishna; Pal, Prem; Pandey, Ashok Kumar

doi:10.1007/s00542-020-05059-2

Cited by 12 publications

(9 citation statements)

References 25 publications

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“…2D modeling is capable to capture manufacturing tolerances. Unfortunately, the main drawback of this approach is that fabrication process defects as scalloping, slanting or undercut cannot be fully taken into account in the 2D design simulation process [26]. This is partly due to the inability of the 2D analytic formulas and FEM models to capture most realistic details of device fabrication as model variations in x, y and z directions generated by these defects.…”

Section: D Simulations-based Design Methodology For Fbarmentioning

confidence: 99%

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3D Simulation-Based Acoustic Wave Resonator Analysis and Validation Using Novel Finite Element Method Software

Morales

Cisneros

Perez

et al. 2021

Sensors

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This work illustrates the analysis of Film Bulk Acoustic Resonators (FBAR) using 3D Finite Element (FEM) simulations with the software OnScale in order to predict and improve resonator performance and quality before manufacturing. This kind of analysis minimizes manufacturing cycles by reducing design time with 3D simulations running on High-Performance Computing (HPC) cloud services. It also enables the identification of manufacturing effects on device performance. The simulation results are compared and validated with a manufactured FBAR device, previously reported, to further highlight the usefulness and advantages of the 3D simulations-based design process. In the 3D simulation results, some analysis challenges, like boundary condition definitions, mesh tuning, loss source tracing, and device quality estimations, were studied. Hence, it is possible to highlight that modern FEM solvers, like OnScale enable unprecedented FBAR analysis and design optimization.

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Section: D Simulations-based Design Methodology For Fbarmentioning

confidence: 99%

“…Nevertheless, there still exist challenges that limit the level of representation accuracy of modern 3D FEM simulation tools available today. This section outlines some of those challenges and presents a review of typical design process based on 3D simulations [27,28].…”

Section: D Simulations-based Design Methodology For Fbar Using Onscalementioning

confidence: 99%

3D Simulation-Based Acoustic Wave Resonator Analysis and Validation Using Novel Finite Element Method Software

Morales

Cisneros

Perez

et al. 2021

Sensors

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“…The vibratory element or proof mass can be in the form of a beam, plate or shell suspended by flexible beams above a substrate [16]. The simplified equation of motion of MEMS vibratory gyroscopes is based on a spring-mass-damper system [17], which can be based on linear or torsional motion [16]. In linear MEMS gyroscopes, the proof mass should be free to vibrate in two orthogonal linear directions, in which the supporting beams are in the form of crab-leg, serpentine, U-shape, and frame [18][19][20].…”

Section: Introductionmentioning

confidence: 99%

Analytical modeling of an inclined folded-beam spring used in micromechanical resonator devices

Rahbar Ranji,

Li,

Alirezaee

et al. 2023

Eng. Res. Express

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Accurate estimation of the mechanical behavior of springs is crucial for the proper design of Microelectormechanical systems (MEMS). The main objective of this study is to derive a closed-form equation for the calculation of the stiffness of an inclined spring in the form of folded beams. The energy-based method was used to calculate the displacements of a folded beam that was fixed at one end and giuded at the other end. The analytical model was then compared with the finite element method using ANSYS for different inclination angles of the folded beam spring, showing good agreement. The angle on inclination has changed from zero to 180 degress, and stiffness of folded beam is detemined. The derived expressions of the compliances were checked for the case of serpentine springs with inclination angle of zero, and different length ratios against the literature. It is found that neglecting small lengths for calculating the stiffness of the folded beam spring is not justified. The influential geometrical parameters, including different lengths of the spring and inclination angle of the spring, on the stiffness are studied. It is found that the angle of inclination of the principal axes of spring constants depends on the geometrical parameters, and the angle of inclination has more effect on the stiffness of a folded beam spring than the number of folds.

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“…Micro-electromechanical system (MEMS) gyroscopes, measuring the angular rate motion based on the Coriolis effect [ 1 ], have been widely adopted for industrial and consumer applications [ 2 , 3 ] for their small size, high integration, low cost, and low power consumption. With the rapid development of electronic techniques, the performance of MEMS gyroscopes has been considerably improved, bringing a new future for potential military applications [ 4 , 5 , 6 , 7 ].…”

Section: Introductionmentioning

confidence: 99%

A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes

Wei

Guo

et al. 2021

Micromachines

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With the development of the designing and manufacturing level for micro-electromechanical system (MEMS) gyroscopes, the control circuit system has become a key point to determine their internal performance. Nevertheless, the phase delay of electronic components may result in some serious hazards. This study described a real-time circuit phase delay correction system for MEMS vibratory gyroscopes. A detailed theoretical analysis was provided to clarify the influence of circuit phase delay on the in-phase and quadrature (IQ) coupling characteristics and the zero-rate output (ZRO) utilizing a force-to-rebalance (FTR) closed-loop detection and quadrature correction system. By deducing the relationship between the amplitude-frequency, the phase-frequency of the MEMS gyroscope, and the phase relationship of the whole control loop, a real-time correction system was proposed to automatically adjust the phase reference value of the phase-locked loop (PLL) and thus compensate for the real-time circuit phase delay. The experimental results showed that the correction system can accurately measure and compensate the circuit phase delay in real time. Furthermore, the unwanted IQ coupling can be eliminated and the ZRO was decreased by 755% to 0.095°/s. This correction system realized a small angle random walk of 0.978°/√h and a low bias instability of 9.458°/h together with a scale factor nonlinearity of 255 ppm at room temperature. The thermal drift of the ZRO was reduced to 0.0034°/s/°C at a temperature range from −20 to 70 °C.

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Influence of fabrication tolerances on performance characteristics of a MEMS gyroscope

Cited by 12 publications

References 25 publications

3D Simulation-Based Acoustic Wave Resonator Analysis and Validation Using Novel Finite Element Method Software

3D Simulation-Based Acoustic Wave Resonator Analysis and Validation Using Novel Finite Element Method Software

Analytical modeling of an inclined folded-beam spring used in micromechanical resonator devices

A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes

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