Influence of Force Acting on Side Face of Carbon Nanotube in Atomic Force Microscopy

Akita, Seiji; Nishijima, Hidehiro; Kishida, Takayoshi; Nakayama, Yoshikazu

doi:10.1143/jjap.39.3724

Cited by 53 publications

(38 citation statements)

References 18 publications

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“…While much has been reported on the improved imaging capabilities of CNT AFM probes, this paper explores undesirable image artefacts that actually degrade image resolution when using CNT AFM probes in the attractive regime. This paper builds on prior work using CNT AFM probes by Akita et al [15,16], Kuwahara et al [17], and Park et al [18]. Through carefully designed experiments, each artefact is qualitatively linked to CNT AFM probe characteristics, such as CNT orientation, bending, stiction, and to DFM operating parameters, such as amplitude set-point ratio and driving amplitude.…”

Section: Introductionmentioning

confidence: 87%

Imaging artefacts in atomic force microscopy with carbon nanotube tips

Strus¹,

Raman²,

Han³

et al. 2005

Nanotechnology

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Dynamic atomic force microscopy (dynamic AFM) with carbon nanotube tips has been suggested as an enabling tool for high precision nanometrology of critical dimension features of semiconductor surfaces. We investigate the performance of oscillating AFM microcantilevers with multi-walled carbon nanotube (multi-walled CNT) tips interacting with high aspect ratio structures while in the attractive regime of dynamic AFM. We present experimental results on SiO 2 gratings and tungsten nanorods, which show two distinct imaging artefacts, namely the formation of divots and large ringing artefacts that are inherent to CNT AFM probe operation. Through meticulous adjustment of operating parameters, the connection of these artefacts to CNT bending, adhesion, and stiction is described qualitatively and explained.

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Section: Introductionmentioning

confidence: 87%

Imaging artefacts in atomic force microscopy with carbon nanotube tips

Strus¹,

Raman²,

Han³

et al. 2005

Nanotechnology

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“…[9][10][11][12][13][14][15][16][17] In previous experiments, the modulus and strain widely ranged from 90 to 4000 GPa and 0.01 to 0.1, respectively. [18][19][20][21][22][23][24][25] Such mechanical properties are associated with the atomistic structural dynamics during deformation. However, no experiment has been performed to analyze the relationship between mechanical properties and structural dynamics, because it was difficult to perform the manipulation of individual SWCNTs and to simultaneously observe tensile deformation at an atomic scale.…”

Section: Introductionmentioning

confidence: 99%

Atomistic dynamics of deformation, fracture, and joining of individual single-walled carbon nanotubes

Asaka

Kizuka

2005

Phys. Rev. B

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The tensile deformation process of individual single-walled carbon nanotubes ͑SWCNTs͒ was in situ observed with measurements of the mechanical properties by transmission electron microscopy combined with the functions of scanning probe microscopy. The values of Young's modulus, tensile stress and strain at the fracture of SWCNTs are 950± 130 GPa, 25± 1 GPa, and 0.30± 0.03, respectively. It was shown that two tips of fractured SWCNTs can be recovered to produce a single tubular structure by contact under compressive force and bias voltage. The in situ observations also demonstrated the formation of carbon monatomic wires during the fracture process of SWCNTs.

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“…In spite of their inherent cost and complexity, SEM-based DA methods are currently the most reliable, reproducible and versatile method of CNT fabrication. In addition to AFM probes, [51][52][53]55 and MFM probes, 54 nanoindenter probes, 35,41,42 four-point surface conductivity probes, 22 and STM probes 45 have all been fabricated by various SEMbased DA methods.…”

Section: Probe Fabrication By Da Methodsmentioning

confidence: 99%

“…Unlike more common probe materials, both SWNTs and MWCNTs can be deformed to a remarkable extent, and regain their original shape when the stress is relieved. [33][34][35][36][37][38] In our experience, CNT probe destruction during tip crash is generally the result of failure of the CNT/probe junction, rather than failure of the CNT itself. To minimize stress on the CNT/probe junction, the thinnest and longest and therefore most compliant CNT compatible with the particular SPM application should be used.…”

Section: Mechanical Considerationsmentioning

confidence: 99%