2011
DOI: 10.1016/j.jallcom.2011.02.168
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Influence of GaCl carrier gas flow rate on properties of GaN films grown by hydride vapor-phase epitaxy

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Cited by 4 publications
(7 citation statements)
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“…In order to study the influence of stress in GaN crystals grown by HVPE on MGS substrates, the GaN growth process was in all cases carried out at the same growth temperature, Ga-pane growth surface, and gas flow rate. Both growth conditions A and B were used to grow GaN on a MGA substrate, and mirror-like smooth GaN films were obtained 19 30 . The stress condition in GaN grown on a MGA substrate is compressive in nature 19 , while on a MGS substrate it is tensile in nature.…”
Section: Resultsmentioning
confidence: 99%
“…In order to study the influence of stress in GaN crystals grown by HVPE on MGS substrates, the GaN growth process was in all cases carried out at the same growth temperature, Ga-pane growth surface, and gas flow rate. Both growth conditions A and B were used to grow GaN on a MGA substrate, and mirror-like smooth GaN films were obtained 19 30 . The stress condition in GaN grown on a MGA substrate is compressive in nature 19 , while on a MGS substrate it is tensile in nature.…”
Section: Resultsmentioning
confidence: 99%
“…in which s is the residual stress and Dw is the E 2 (high) phonon band shift. [40,41] The stress-free GaN E 2 (high) mode is located at 566.2 cm À1 . [42,43] For GaN (001), GaN (00À1) and GaN (100), the position of the E 2 (high) phonon band remains located at 567.7 cm À1 ,c orresponding to as tress of 0.348 GPa.…”
Section: Resultsmentioning
confidence: 99%
“…Ramans catteringh as been extensively applied to study IIInitridesa nd is ap rovenm ethod fors tudying stress, which is an important factor for the energy band structure and phonon vibrations. [38][39][40] Figure1cs hows the Raman spectra of the differentc rystallographic facets of the GaN crystal.O nly E 2 (high) and A 1 (LO) phononb ands are observed on GaN (001) and GaN (00À1), and otherp honon peaks disappear.M eanwhile, the A 1 (TO), E 1 (TO) and E 2 (high) phononm ode bands appear simultaneously on the GaN (100) facet. These resultsc onform to the Ramans electionr ule.…”
Section: Resultsmentioning
confidence: 99%
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