Influence of Gas Temperature on Nucleation and Growth of Dust Nanoparticles in RF Plasma

Orazbayev, Sagi; Hénault, Marie; Рамазанов, Т. С.; Boufendi, Laïfa; Batryshev, D.G.; Габдуллин, М. Т.

doi:10.1109/tps.2019.2912805

Cited by 4 publications

(3 citation statements)

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“…A decrease in the electron density characterizes an increase in particle size, that is, the larger the particle size, the larger their surface and a greater number of electrons are absorbed, and thus this leads to a decrease in the electron density. The obtained results are consistent with the results of [36][37][38][39], where the kinetics of particle growth in the plasma of an argon/silane and argon/ acetylene gas mixture is presented. This experimental fact showed that the diameter of the nanoparticles directly depends on the ratio of the self-bias voltage to the electron concentration.…”

Section: A Mechanism Of Carbon Nanoparticles Growthsupporting

confidence: 90%

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Plasma with carbon nanoparticles: advances and application

et al. 2021

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This article is devoted to the study of the glow intensity of radio-frequency capacitive discharge plasma with nanoparticles for further use in lighting devices. The process of carbon nanoparticles synthesis in the radiofrequency discharge was investigated, and the influence of plasma parameters on the formation and growth of the material was also studied. A method for determining the diameter of nanoparticles based on self-bias voltage and electron density is considered. It is revealed that the diameter of nanoparticles has a considerable influence on the optical properties of the plasma, in particular, on the emission intensity. Based on the obtained data, laboratory samples of lighting devices with improved luminous intensities were developed.

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Section: A Mechanism Of Carbon Nanoparticles Growthsupporting

confidence: 90%

“…Self-bias voltage and electron density as a function of time make it possible to determine the diameter and density of nanoparticles. The particle diameter can be found using the following formula [36,37]:…”

Section: A Mechanism Of Carbon Nanoparticles Growthmentioning

confidence: 99%

Plasma with carbon nanoparticles: advances and application

et al. 2021

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“…Осы параметрлердің оңтайлы мәндерін анықтау ЖЖ разрядында нанобөлшектердің түзілуін бақылауға және оңтайландыруға мүмкіндік береді [13][14][15][16] Бұл жұмыстың негізгі мақсаты ЖЖ разряд негізіндегі PECVD әдісін қолдану арқылы алынған нанобөлшектердің плазма параметрлеріне (температура, қысым және т.б) әсерлерін зерттеу.…”

Section: кіріспеunclassified

Nanoparticle Synthesis by the Pecvd Method Based on Rf Discharge

Zharylgapov,

Orazbayev

2023

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This scientific paper presents the results of the study of the synthesis of carbon nanoparticles in radio-frequency ( RF ) discharge plasma at low pressures in a vacuum apparatus. The growth of carbon nanoparticles was studied under different plasma parameters, such as variation of self-displacement voltage, temperature, and discharge power. The experiment was performed in the pressure range of 0.5-1.1 mbarr and powers of 6-20 W. The results showed that the synthesis time of carbon nanoparticles, including their formation and growth, depends on the plasma parameters. Small changes in temperature, pressure, and plasma power can significantly change the growth and formation of nanoparticles. An important conclusion of this work is that increasing the temperature of the plasma-forming gas leads to an increase in the formation time of carbon nanoparticles. The dependences of nanoparticle growth on the discharge power, selfdisplacement voltage on the discharge pressure, and temperature on the discharge power were also obtained. The results obtained provide valuable information for understanding and controlling the synthesis process of carbon nanoparticles in the plasma environment. This is important for various technological applications, including nanoelectronics and catalysis.

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