Influence of hydrogen plasma on SnO2 thin films

Tompakova, N.M.; Dmitriyeva, Elena; Lebedev, Igor; Serikkanov, Abay; Grushevskaya, E.A.; Mit, K.A.; Fedosimova, Anastasiya

doi:10.1016/j.matpr.2019.12.053

Cited by 7 publications

(5 citation statements)

References 16 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…It has been documented that these peaks indicate that Sn 4+ is reduced to Sn 0 after plasma exposure, which is consistent with previous findings on surfaces exposed to low-pressure hydrogen plasma [29,30]. A similar component in the Sn 3d 5/2 peak was recently observed by Kwoka et al [31]. As seen in figure 18, the peak value of tin dioxide decreases, while the peak value of tin oxide increases after 1 W cleaning.…”

Section: Diagnosis Of Plasma Parameterssupporting

confidence: 90%

“…Another peak occurs at 531.5-532.5 eV, defined as O chem , which may represent a metal carbonate or carbon-oxygen bond, as taken from the NIST database [28]. In a previous study [31], it was noted that there was a comparable component in the O 1s peak (~532 eV). This was explained by the presence of oxygen atoms chemisorbed on the surface, which is consistent with recent observations by Mulla et al [33] and Yea et al [34].…”

Section: Diagnosis Of Plasma Parametersmentioning

confidence: 98%

See 1 more Smart Citation

Investigation of an electrode-driven hydrogen plasma method for in situ cleaning of tin-based contamination

PENG 彭,

YE 叶,

WANG 王

et al. 2024

Plasma Sci. Technol.

View full text Add to dashboard Cite

To prolong the service life of the optics, the feasibility of in situ cleaning of multilayer mirror (MLM) of tin and its oxidized contamination was investigated using hydrogen plasma at different powers. Granular tin-based contamination consisting of micro and macro particles was deposited on the silicon by physical vapor deposition (PVD). The electrode-driven hydrogen plasma at different powers was systematically diagnosed using the Langmuir probe and the retarding field ion energy analyzer (RFEA). Moreover, the magnitude of the self-biasing voltage was measured at different powers, and the peak ion energy was corrected for the difference between the RFEA measurements and the self-biasing voltage (ΕRFEA-eVself). XPS analysis of O 1s, Sn 3d peaks demonstrated the chemical reduction process after 1 W cleaning. Analysis of surface and cross-section morphology revealed the holes emerged on the upper part of the macroparticles while its bottom remained smooth. Hills and folds appeared on the upper part of the microparticles, confirming the top-down cleaning mode with hydrogen plasma. This study provides in situ electrode-driven hydrogen plasma etching process of tin-based contamination and is of meaningful guidance for understanding the chemical mechanism of reduction and etching.

show abstract

Section: Diagnosis Of Plasma Parameterssupporting

confidence: 90%

Section: Diagnosis Of Plasma Parametersmentioning

confidence: 98%

Investigation of an electrode-driven hydrogen plasma method for in situ cleaning of tin-based contamination

PENG 彭,

YE 叶,

WANG 王

et al. 2024

Plasma Sci. Technol.

View full text Add to dashboard Cite

show abstract

“…The gap between ZnO nanoparticles is enlarged and more channels form, which allows more gas molecules to enter the ZnO nanofibers to improve the gas-sensing properties of the ZnO-O sensor. We also find a difference in surface area between ZnO-O nanofibers (16.67) and ZnO-H nanofibers (9.022), which may be due to O–H bonds produced by a chemical reaction between the hydrogen plasma and the adsorbed oxygen on the material surface, which block the pores and channels of the ZnO nanofibers …”

Section: Resultsmentioning

confidence: 84%

“…However, ZnO-H has a smaller diameter than ZnO-O and a larger diameter than ZnO-U; few pores were discovered in the ZnO-H fiber. When ZnO nanofibers are treated with hydrogen plasma, the hydrogen plasma will combine with oxygen on the surface of ZnO to form O–H bonds that cover the ZnO nanofiber, the diameter of the ZnO-H nanofiber slightly increases, and the surface of the ZnO-H nanofiber becomes smooth because it is covered in O–H bonds …”

Section: Resultsmentioning

confidence: 99%

Oxygen-Plasma-Assisted Enhanced Acetone-Sensing Properties of ZnO Nanofibers by Electrospinning

Yang

et al. 2020

ACS Appl. Mater. Interfaces

View full text Add to dashboard Cite

In this Article, ZnO nanofibers were prepared by electrospinning. The as-prepared ZnO electrospun fibers were treated with plasma. The morphology, structure, and element content of the ZnO nanofibers greatly changed after treatment with different plasmas. The test results indicated that the acetone-sensing performance was remarkably improved for oxygen-plasma-assisted ZnO nanofibers. Furthermore, the density function theory (DFT) calculation results revealed that the acetone adsorption energy of ZnO nanofibers treated with oxygen plasma was 2 times greater than that of untreated ZnO nanofibers, and the electrons transferred between ZnO nanofibers and acetone molecules produced a more remarkable change in electronic structure for the oxygen-plasma-treated ZnO nanofibers. Our work demonstrates that the oxygen plasma treatment method can help improve the acetone-sensing performance of ZnO nanofibers.

show abstract

“…To reduce fluctuations from layer to layer, a signal accumulation method along the spectrum was used. This method allows for a softer minimization of fluctuations from layer to layer, in contrast, for example, to fitting with a polynomial function [29]. Smoothing was carried out at three points in accordance with the formula:…”

Section: The Analysis Procedure: the Size-rate Functionmentioning

confidence: 99%

Direct Measurements of Cosmic Rays (TeV and beyond) Using an Ultrathin Calorimeter: Lessening Fluctuation Method

et al. 2021

View full text Add to dashboard Cite

In this paper, we propose a method that makes it possible to use an ultrathin calorimeter for direct measurements of cosmic rays with energies of TeV and higher. The problems of determining the primary energy with a thin calorimeter, due to large fluctuations in shower development, the low statistics of analyzed events and the large size required for the calorimeter, are considered in detail. A solution to these problems is proposed on the basis of a lessening fluctuation method. This method is based on the assumption of the universality of the development of cascades initiated by particles of the same energy and mass. For energy reconstruction, so-called correlation curves are used. The main analyzed quantities are the size of the cascade and the rate of its development. The method was tested using the calorimeter of the PAMELA collaboration. Based on simulations, it is shown that the primary energy can be determined on the ascending branch of the cascade curve. This fact solves the problems associated with the need to increase the calorimeter thickness with an increase in primary energy and with the limitation of the analyzed events. The proposed technique is universal for different energies and different nuclei.

show abstract

Influence of hydrogen plasma on SnO2 thin films

Cited by 7 publications

References 16 publications

Investigation of an electrode-driven hydrogen plasma method for in situ cleaning of tin-based contamination

Investigation of an electrode-driven hydrogen plasma method for in situ cleaning of tin-based contamination

Oxygen-Plasma-Assisted Enhanced Acetone-Sensing Properties of ZnO Nanofibers by Electrospinning

Direct Measurements of Cosmic Rays (TeV and beyond) Using an Ultrathin Calorimeter: Lessening Fluctuation Method

Contact Info

Product

Resources

About