2011
DOI: 10.1063/1.3596451
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Influence of intensity loss in the cavity of a folded Fabry-Perot interferometer on interferometric signals

Abstract: Fabry-Perot interferometer is often used for the micro-displacement, because of its common optical path structure being insensitive to the environmental disturbances. Recently, the folded Fabry-Perot interferometer has been investigated for displacement measurements in large ranges. The advantages of a folded Fabry-Perot interferometer are insensitive to the tilt angle and higher optical resolution. But the design of the optical cavity has become more and more complicated. For this reason, the intensity loss i… Show more

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Cited by 12 publications
(7 citation statements)
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“…3(b) for the Au samples with 120 nm of slit width and thicknesses of 120, 180, 260, 360, and 450 nm, we determine the reflectivities R ¼ 0:66, 0.99, 0.79, 0.98, and 0.91, and the resultant finesses F ¼ 7:45, 312.58, 13.27, 155.49, and 33.29, respectively. Here it is important to point out that for an FP cavity, the definition of quality factor (Q factor) is equivalent to the finesse [26]. Therefore, we can clearly see that both the R and Q factor values are significantly affected by the film thickness for a fixed slit width.…”
Section: Resultsmentioning
confidence: 99%
“…3(b) for the Au samples with 120 nm of slit width and thicknesses of 120, 180, 260, 360, and 450 nm, we determine the reflectivities R ¼ 0:66, 0.99, 0.79, 0.98, and 0.91, and the resultant finesses F ¼ 7:45, 312.58, 13.27, 155.49, and 33.29, respectively. Here it is important to point out that for an FP cavity, the definition of quality factor (Q factor) is equivalent to the finesse [26]. Therefore, we can clearly see that both the R and Q factor values are significantly affected by the film thickness for a fixed slit width.…”
Section: Resultsmentioning
confidence: 99%
“…10(b) for the Au samples with 120nm of slit width and thicknesses of 120, 180, 260, 360, and 450 nm, we determine the reflectivities R = 0. 66, 0.99, 0.79, 0.98, and 0.91, and the resultant finesses F = 7.45, 312.58, 13.27, 155.49, and 33.29, respectively. Here it is important to point out that for an FP cavity, the definition of quality factor (Q factor) is equivalent to the finesse (Shyu et al, 2011). Therefore, we can clearly see that both the R and Q factor values are significantly affected by the film thickness for a fixed slit width.…”
Section: Resultsmentioning
confidence: 99%
“…According to the proposed structure based on multi-beam interference, the laser beam passes through the optical cavity repeatedly, so the transmittance of the intensity loss from the cavity needs to be considered. In order to obtain the continuous change of the signal, the reflectance of the plane mirror is adjusted for further signal processing [30,31]. The theoretical formula of the interferometric light intensity is illustrated in Equation 2to Equation 5, where A 0 is the amplitude of the laser, R and T are the reflectance and transmittance of the plane mirror, L is the transmittance evaluated by the intensity loss in the optical cavity.…”
Section: Measurement Module For Linear Displacementmentioning
confidence: 99%