2003
DOI: 10.1063/1.1572471
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Influence of interfacial nitrogen on edge charge trapping at the interface of gate oxide/drain extension in metal–oxide–semiconductor transistors

Abstract: Articles you may be interested inDesign and control of Ge-based metal-oxide-semiconductor interfaces for high-mobility field-effect transistors with ultrathin oxynitride gate dielectrics Appl. Phys. Lett. 103, 033502 (2013); 10.1063/1.4813829Interface traps responsible for negative bias temperature instability in a nitrided submicron metal-oxidesemiconductor field effect transistor Appl. Phys. Lett. 98, 103513 (2011); 10.1063/1.3559223Interface trap and oxide charge generation under negative bias temperature i… Show more

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Cited by 4 publications
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