2022
DOI: 10.1016/j.actamat.2022.118160
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Influence of ion irradiation-induced defects on phase formation and thermal stability of Ti0.27Al0.21N0.52 coatings

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Cited by 12 publications
(5 citation statements)
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“…For all three material systems, an acceleration voltage of 10 kV was applied. Due to the overlapping Ti Lα and N Kα signals, elastic-recoil detection analyzed TiN [41] and TiAlN [42] standards were used for the chemical quantification of the respective thin films.…”
Section: Methodsmentioning
confidence: 99%
“…For all three material systems, an acceleration voltage of 10 kV was applied. Due to the overlapping Ti Lα and N Kα signals, elastic-recoil detection analyzed TiN [41] and TiAlN [42] standards were used for the chemical quantification of the respective thin films.…”
Section: Methodsmentioning
confidence: 99%
“…For all three material systems, an acceleration voltage of 10 kV was applied. Due to the overlapping Ti Lα and N Kα signals, elastic‐recoil detection analyzed TiN [ 45 ] and (Ti,Al)N [ 46 ] standards were used for the chemical quantification of the respective thin films.…”
Section: Methodsmentioning
confidence: 99%
“…The concentration of such lattice defects can also be increased through the accelerated N 2 + . This effect is clearly observed upon increasing bias voltage (and hence ion energy) up to 60 V. Other point defects like Frenkel pairs (i.e., nitrogen atoms dislocated from their original sites to the interstitial sites) can also increase the lattice parameter [40], yet, unlike interstitial atoms, they preserve the stoichiometry. Also Schottky defects, though decreasing the lattice parameter, cannot be ruled out as they generally have a relatively low energy of formation [41][42][43].…”
Section: Atomic Structurementioning
confidence: 96%