Influence of liquid properties on the performance of S0-mode Lamb wave sensors: A theoretical analysis

Mirea, Teona; Yantchev, Ventsislav

doi:10.1016/j.snb.2014.11.026

Cited by 16 publications

(8 citation statements)

References 25 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In previous works [9,10] it was stated that the decrease in ε induces positive shifts in frequency due to variations in the k eff 2 of the resonators. Since, (ρη) 0.5 is increased with solute concentration and ε is decreased, what we see in Fig.…”

Section: Experimental Methodsmentioning

confidence: 99%

“…The model intends to accounts for the acoustic coupling to the liquid through shear stresses. A detailed description of the model can be found elsewhere [9,10]. The structure of the SMR consists of a 1.6 µm-thick AlN film with tilted grains, sandwiched between a 160 nm-thick Ir bottom electrode and a 500 nm-thick Mo top electrode.…”

Section: Devices and Feamentioning

confidence: 99%

“…On the contrary, Lamb wave resonators employing the S 0 mode (S 0 -LWR) have demonstrated great potential for gravimetric sensors and suitability for in-liquid operation [8] with the advantage of using commercial c-oriented piezoelectric technology. The in-liquid sensing mechanisms and performance of S 0 -LWRs have been thoroughly described only recently [9,10], however they have not been compared to their FBAR counterparts.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

S0 Lamb wave resonators for in-liquid sensing: Promising alternative to shear bulk acoustic wave devices

Mirea

Iborra

Yantchev

2016

2016 European Frequency and Time Forum (EFTF)

Self Cite

View full text Add to dashboard Cite

Sensors capable of in-liquid operation are of primary importance not only for biosensors applications but also for liquid monitoring. Thin film electroacoustic (TEA) devices have emerged as promising choice for such applications. The most common TEA devices are the thin film bulk acoustic wave resonator (FBAR) and the Lamb wave resonator (LWR). FBAR operating on the shear mode have been widely studied in view of biosensors applications. A theoretical framework describing the in-liquid sensitivity features of LWR employing the S0 mode (S0-LWR) has been experimentally proven recently. However, a comparison between both devices has not been performed yet. Here we theoretically and experimentally compare AlN-based S0-LWR and FBARs on their solidly mounted modality (SMR), in terms of their in-liquid sensitivity features at similar frequencies.S0-LWR prove to be slightly more sensitive to the density and viscosity of the liquids. Moreover, if a metallic bottom electrode is not deposited on their backside they can also sense variations in the dielectric permittivity of the liquid, which cannot be done with common SMRs.

show abstract

Section: Experimental Methodsmentioning

confidence: 99%

Section: Devices and Feamentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

S0 Lamb wave resonators for in-liquid sensing: Promising alternative to shear bulk acoustic wave devices

Mirea

Iborra

Yantchev

2016

2016 European Frequency and Time Forum (EFTF)

Self Cite

View full text Add to dashboard Cite

show abstract

“…To predict the experimental results, we carried out a 2D finite element analysis to theoretically assess the behavior of our devices towards p and r¡ variations in the liquid. We used a previouslydesigned FEM model [32][33][34] designed to accurately account for the acoustic coupling to the liquid through shear stresses. The structures we employed for the simulations were single cells with lateral periodic conditions (Fig.…”

Section: Fem Simulationsmentioning

confidence: 99%

Impact of FBAR design on its sensitivity as in-liquid gravimetric sensor

Mirea

Olivares

Clément

et al. 2019

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

In contrast to quartz crystal microbalances, the sensitivity of thin film bulk acoustic wave resonators (FBARs) is strongly dependent on all films comprising the multilayered structure. Previous studies proved that placing low acoustic impedance materials at the sensing surface of longitudinal-mode FBARs operating in air can enhance their mass sensitivity by modifying the energy trapped at the sensing surface.Here we investigate if the in-liquid sensitivity to density-viscosity and mass of shear-mode AIN-based solidly mounted resonators displays a similar dependence on the device configuration. By using the finite element simulation method accompanied by experimental verifications we demonstrate that for a given value of the resonant frequency, the sensitivity can be boosted by a proper design of the devices. The results can be of application to in-liquid physical sensors or to gravimetric chemical or biological sensors.

show abstract

“…First, the sensor was intended to operate in liquid media (buffers), which usually display ionic conductivity. As mentioned above, the need to operate in fluids imposes the use of the shear mode to prevent excessive acoustic energy losses into the medium [22]. Fig.…”

Section: Design Of Sensorsmentioning

confidence: 99%

Gravimetric biosensor based on a 1.3 GHz AlN shear-mode solidly mounted resonator

DeMiguel-Ramos

Díaz-Durán

Escolano

et al. 2017

Sensors and Actuators B: Chemical

Self Cite

View full text Add to dashboard Cite

We investigate the performance of solidly mounted resonators based on Ir/tilted-AlN/Ir piezoelectric stacks as biosensors. These films are deposited by varying the pressure, the cathode power and the temperature of a two-step process based on depositing (00 2)-til ted AIN active layers over an (10 3)-oriented AIN seed layer. To minimize the influence of the temperature coefficient of frequency on the stability of the biosensor, we use insulating acoustic mirrors made of layers of Si0 2 and amorphous TaO x with non-\/4 thicknesses, which enables to reduce the TCF to-14 ppm/°C. The mass loading of the resonators with SÍO2 thin films results in a sensitivity of 1800 kHz/pg cm 2. Surface functionalization consists on the binding of silane groups on plasma oxidized SÍO2 surfaces. After a glutaraldehyde link, streptavidin is bonded to the surface to receive biotinylated receptors for several species. We test thrombin-binding aptamer (TBA29 against thrombin, and IgG antibody against immunoglobulin). The sensors response to species of different molecular weight like TBA-29 (9.75 kDa) or IgG antibody (150 kDa) is monitored. Finally, we assess the response of the biosensors to different thrombin concentrations (ranging from 4 nM to 270 nM) on surfaces functionalized with the TBA29 aptamer.

show abstract

Influence of liquid properties on the performance of S0-mode Lamb wave sensors: A theoretical analysis

Cited by 16 publications

References 25 publications

S0 Lamb wave resonators for in-liquid sensing: Promising alternative to shear bulk acoustic wave devices

S0 Lamb wave resonators for in-liquid sensing: Promising alternative to shear bulk acoustic wave devices

Impact of FBAR design on its sensitivity as in-liquid gravimetric sensor

Gravimetric biosensor based on a 1.3 GHz AlN shear-mode solidly mounted resonator

Contact Info

Product

Resources

About