Influence of machining errors on form errors of microlens arrays in ultra-precision turning

Liu, Xianlei; Zhang, Xiaodong; Fang, Fengzhou; Zeng, Zhaofa; Gao, Huimin; Hu, Xiaotang

doi:10.1016/j.ijmachtools.2015.05.008

Cited by 53 publications

(21 citation statements)

References 27 publications

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“…The procedures of single point diamond turning of microlens arrays on a flat surface were described by Zhang et al [20]. A design model is first generated based on the ideal structures of microlens array.…”

Section: Ultraprecision Machining Methodsmentioning

confidence: 99%

“…Since the 1980s, the fabrication of microlens array is realized by different methods, such as Micro-electromechanical Systems (MEMS) based technologies [10][11][12][13][14][15][16][17] and ultraprecision machining technologies [18][19][20]. However, little work has been focused on the comparison of these method in terms of the surface finish, form error and the efficiency of production.…”

Section: Introductionmentioning

confidence: 99%

“…However, little work has been focused on the comparison of these method in terms of the surface finish, form error and the efficiency of production. One of the major challenge in the fabrication of the microlens array is the fabrication and assembly accuracy in a large area [19][20][21]. As the image resolution of a compound eye optical system is increased with the number of microlens and the radius of each microlens unit, enlarging the overall size of a microlens array can make up the deficiency.…”

Section: Introductionmentioning

confidence: 99%

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Fabrication of Microlens Array and Its Application: A Review

Wang

Lee

et al. 2018

Chin. J. Mech. Eng.

139

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Microlens arrays are the key component in the next generation of 3D imaging system, for it exhibits some good optical properties such as extremely large field of view angles, low aberration and distortion, high temporal resolution and infinite depth of field. Although many fabrication methods or processes are proposed for manufacturing such precision component, however, those methods still need to be improved. In this review, those fabrication methods are categorized into direct and indirect method and compared in detail. Two main challenges in manufacturing microlens array are identified: how to obtain a microlens array with good uniformity in a large area and how to produce the microlens array on a curved surface? In order to effectively achieve control of the geometry of a microlens, indirect methods involving the use of 3D molds and replication technologies are suggested. Further development of ultraprecision machining technology is needed to reduce the surface fluctuation by considering the dynamics of machine tool in tool path planning. Finally, the challenges and opportunities of manufacturing microlens array in industry and academic research are discussed and several principle conclusions are drawn.

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Section: Ultraprecision Machining Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Fabrication of Microlens Array and Its Application: A Review

Wang

Lee

et al. 2018

Chin. J. Mech. Eng.

139

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“…Both B-axis and C-axis serve as the angular servo axis. e 5-axis measuring machine composes of eight-part rigid bodies [18], as shown in Figure 2. e base of the 5-axis measuring machine is selected as the zeroth-order body, and the remaining adjacent bodies are numbered in sequence; thus, the Z-axis, Y-axis, C-axis, workpiece, X-axis, B-axis, and the measurement probe are represented by rigid body 1 to 7 in succession, respectively.…”

Section: E Description Of the 5-axis Measuring Machinementioning

confidence: 99%

“…Additionally, the position errors and some orientation errors can be Mathematical Problems in Engineering negligible in measurement error modeling because of the choice of the coordinate system and reference position, and there remain only seven orientation errors, which refer to the volumetric squareness errors among the five axes [7]. It means that the location errors can be ignored when the squareness errors are fully considered; therefore, it can be considered that a 5-axis measuring machine totally introduces 37 geometric error items; this simplification will not affect the analysis result and is generally accepted in the field of machine tool [7,18,27]. e influence of 37 geometric errors on the measurement result for a 5-axis measuring machine is investigated in this study, and the label from h 1 to h 37 is successively employed to stand for all 37 geometric errors for convenience, as listed in Table 1.…”

Section: Geometric Errors and Characteristic Matricesmentioning

confidence: 99%

Error Distribution of a 5-Axis Measuring Machine Based on Sensitivity Analysis of Geometric Errors

Zou

Zhao

Wang

et al. 2020

Mathematical Problems in Engineering

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Geometric errors are inevitably introduced into any multiaxis measuring system, and the geometric error is one of the main factors that seriously affects the measurement accuracy. The present work investigates the error distribution of the prototype of a 5-axis measuring machine based on sensitivity analysis of geometric errors. The measurement error modeling of the 5-axis measuring machine is first established via the homogeneous coordinate transformation, and the Sobol global sensitivity analysis method is then employed to quantify the influence of geometric errors on the measurement result with the sensitivity index. The result shows that most of the angular errors are the crucial geometric errors seriously affecting the measurement result. These errors are supposed to be fully considered in the accuracy design and manufacturing stages. The error levels of the crucial geometric errors were distributed and readjusted according to the sensitivity analysis result. Some practical approaches to distribute and improve the crucial geometric errors have been given in detail. The error distribution method is effective to equalize the influence of the crucial geometric errors on the measurement result as possible. The findings of this study provide significant meanings for the optimal design and accurate manufacturing of the 5-axis measuring machine, and the proposed method can be used to improve the measurement accuracy of the 5-axis measuring machine.

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Introduction to Precision Machining Micro/Nano Structures

Zhang

Cao

2023

Fabrication of Micro/Nano Structures via Precision Machining

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Influence of machining errors on form errors of microlens arrays in ultra-precision turning

Cited by 53 publications

References 27 publications

Fabrication of Microlens Array and Its Application: A Review

Fabrication of Microlens Array and Its Application: A Review

Error Distribution of a 5-Axis Measuring Machine Based on Sensitivity Analysis of Geometric Errors

Introduction to Precision Machining Micro/Nano Structures

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