2015
DOI: 10.1016/j.surfcoat.2015.06.070
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Influence of nitrogen pressure on bonding structure and mechanical properties of pulsed laser deposited BCN thin films

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Cited by 19 publications
(9 citation statements)
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“…In order to reveal the chemical structures of the BCN coatings, the corresponding XPS spectra are shown in Figure 1. As seen in Figure 1(a), three deconvoluted peaks located at about 284.4–284.7 eV, 285.2–285.7 eV, and 288.4–288.8 eV were detected in C1s spectra, which were assigned to C–C (sp 2 ), 2,7,12 C–N (sp 2 ), 2,5,12 and C–N (sp 3 ), 5,12 respectively. For N1s spectra, two deconvoluted peaks located at 397.7–398.8 eV and 399.5–400.1 eV were attributed to N–B bond 10,13 and N–C bond, 7 respectively.…”
Section: Resultsmentioning
confidence: 99%
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“…In order to reveal the chemical structures of the BCN coatings, the corresponding XPS spectra are shown in Figure 1. As seen in Figure 1(a), three deconvoluted peaks located at about 284.4–284.7 eV, 285.2–285.7 eV, and 288.4–288.8 eV were detected in C1s spectra, which were assigned to C–C (sp 2 ), 2,7,12 C–N (sp 2 ), 2,5,12 and C–N (sp 3 ), 5,12 respectively. For N1s spectra, two deconvoluted peaks located at 397.7–398.8 eV and 399.5–400.1 eV were attributed to N–B bond 10,13 and N–C bond, 7 respectively.…”
Section: Resultsmentioning
confidence: 99%
“…The coexistence of B–N, B–C, and N–C bonds in BCN coatings indicated the formation of a ternary BCN hybridization. 2 Furthermore, the apparent changes in intensity and position of shoulder peaks indicated the evolution of bonding structure in the BCN coatings with an increase of bias voltage, which would affect the mechanical properties of the coatings.…”
Section: Resultsmentioning
confidence: 99%
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