Influence of oxygen content on structure and properties of multi-element AlCrSiON oxynitride thin films

Karimi, A.; Morstein, M.; Cselle, T.

doi:10.1016/j.surfcoat.2010.02.029

Cited by 25 publications

(6 citation statements)

References 33 publications

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“…Also, hardness values of such coatings remain low (12)(13) in the range of oxygen ratio [O]/[O + N] of 20%-50% in films as reported by Karimi et al [1] [8]. So, adjusting oxygen and nitrogen contents enables to control the optical, chemical, mechanical and electrical properties of CrAlSiN x and CrAlSiO y N x coatings within a wide range [1,8,35,36]. Despite there are a lot of studies about nitride and oxy-nitrides, only limited researches focus on sputtered CrAlSiN x and CrAlSiO y N x coatings.…”

Section: Introductionmentioning

confidence: 83%

“…Recently, enormous studies and technological efforts have been devoted to the research on those kinds of materials, due to their excellent properties and numerous industrial applications. Chromium nitrides, oxides and oxy-nitrides generally have high oxidation resistance [2][3][4][5][6][7][8][9], chemical and thermal stability at high temperature [10][11][12][13][14][15], good thermal diffusion barrier [16], good corrosion resistance [17] and high hardness [18][19][20][21][22]. The numerous applications are divided into two main groups.…”

Section: Introductionmentioning

confidence: 99%

“…Moreover, Oxygen content in films affect the whole coating properties, as an example, if oxygen content in oxynitrides increase, then films will be more transparent with lower refractive index, because of losing of their metallic behavior. Also, hardness values of such coatings remain low (12)(13) in the range of oxygen ratio [O]/[O + N] of 20%-50% in films as reported by Karimi et al [1] [8]. So, adjusting oxygen and nitrogen contents enables to control the optical, chemical, mechanical and electrical properties of CrAlSiN x and CrAlSiO y N x coatings within a wide range [1,8,35,36].…”

Section: Introductionmentioning

confidence: 99%

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Characterization of magnetron sputtered sub-stoichiometric CrAlSiN x and CrAlSiO y N x coatings

AL-Rjoub

Rebouta

Cerqueira

et al. 2017

Surface and Coatings Technology

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The influence of varying nitrogen and oxygen partial pressures on microstructure, mechanical and optical properties of magnetron sputtered CrAlSiN x and CrAlSiO y N x coatings has been studied. The partial pressure of nitrogen reactive gas was varied from 0.037 Pa to 0.15 Pa for CrAlSiN x films, and the N 2 /O 2 (85%:15%) partial pressure was varied from 0.046 Pa to 0.21 Pa for CrAlSiO y N x layers. Transmittance and reflectance of samples were measured and were modeled to obtain the spectral optical constants, n and k. Chemical state, composition, morphology and microstructure of films were analyzed by XPS, RBS, XRD, Raman Spectroscopy and SEM. Films' hardness was evaluated using nanoindentation method. XRD results revealed that the two samples CrAlSiN x with P N = 0.15 Pa and CrAlSiO y N x with P NO = 0.21 Pa are polycrystalline with cubic (fcc-B 1 ) structure. On contrary, all other films prepared with lower reactive gases partial pressures are amorphous. The chemical composition changed with the variation of reactive gases partial pressure, although the Cr: Al: Si composition ratio remained approximately constant, 1.25:1.5:1. All samples showed low hardness, mainly due to lower content of reactive gases and higher content of Si. However, the sample CrAlSiN x with P N = 0.15 Pa has the highest value of 11.1 GPa. Optical constants are seen to be very sensitive to reactive gases partial pressure. The refractive index and extinction coefficient were lower for coatings with higher reactive gases partial pressure. These coatings are good candidates for designing selective solar absorber stacks for different applications.

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Section: Introductionmentioning

confidence: 83%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Characterization of magnetron sputtered sub-stoichiometric CrAlSiN x and CrAlSiO y N x coatings

AL-Rjoub

Rebouta

Cerqueira

et al. 2017

Surface and Coatings Technology

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“…Therefore other routes to improving the oxidation resistance of TiAlN and AlCrN have been investigated e.g. by intentionally doping AlCrN ceramic coatings with various elements, such as Si [24], including Al 2 O 3 as a minority phase in a quaternary composition by O 2 addition [25] or by including thin intermediate diffusion barrier layers of TiN [26] or Al 2 O 3 in a multilayer coating [27]. The properties of sputtered AlCr-O-N coatings have been shown to be dependent on both the Al-Cr ratio and proportion of O 2 incorporated [24,28,29].…”

Section: Introductionmentioning

confidence: 99%

“…by intentionally doping AlCrN ceramic coatings with various elements, such as Si [24], including Al 2 O 3 as a minority phase in a quaternary composition by O 2 addition [25] or by including thin intermediate diffusion barrier layers of TiN [26] or Al 2 O 3 in a multilayer coating [27]. The properties of sputtered AlCr-O-N coatings have been shown to be dependent on both the Al-Cr ratio and proportion of O 2 incorporated [24,28,29]. Three types of sputtered AlCroxinitride have been identified; at high N 2 compositions >78% the FCC CrN structure is retained and the coatings have high hardness.…”

Section: Introductionmentioning

confidence: 99%

Machining with AlCr-oxinitride PVD coated cutting tools

Pilkington

Dowey

Toton

et al. 2013

Tribology International

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Physical Vapour Deposition (PVD) coating materials based on transition metal oxy-nitrides have been found to offer improved oxidation resistance for tooling applications. Arc deposited AlCrOxN1-x coatings were tested on M2 HSS drills in drilling 2.5D holes in AISI D2. At a speed of 30 m/min and feed 0.025 mm/rev the mean tool life was 17.2 holes /µm for coatings made with a N2/O2 ratio of 0.9/0.1. Coating deposition with a pulse bias of 10 kHz was found to improve tool life in the drilling test by 10% compared to DC bias coatings. In milling of stainless steel AlCrOxN1-x coated carbide end mills cutting AISI 316 at 70 m/min achieved a cut length 2.5X uncoated tools under the accelerated test conditions.

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