1995
DOI: 10.1063/1.114963
|View full text |Cite
|
Sign up to set email alerts
|

Influence of oxygen on the formation of epitaxial erbium silicide film on 〈111〉Si

Abstract: Growth kinetics of amorphous interlayers and formation of crystalline silicide phases in ultrahigh vacuum deposited polycrystalline Er and Tb thin films on (001)Si

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
1
0

Year Published

1996
1996
2004
2004

Publication Types

Select...
6

Relationship

0
6

Authors

Journals

citations
Cited by 8 publications
(1 citation statement)
references
References 4 publications
0
1
0
Order By: Relevance
“…This is probably true except for the highest x, which exceeds the atomic oxygen percentage of 7% actually measured by Rutherford backscattering in samples prepared under an oxygen pressure of 2ϫ10 Ϫ8 torr. 17 Figure 4 shows that the Fermi-level position in these samples undergoes a monotonic decrease as x increases above 3ϫ10 Ϫ3 . Concurrently, ⌽ Bn can reach a value as high as 0.66 eV.…”
mentioning
confidence: 96%
“…This is probably true except for the highest x, which exceeds the atomic oxygen percentage of 7% actually measured by Rutherford backscattering in samples prepared under an oxygen pressure of 2ϫ10 Ϫ8 torr. 17 Figure 4 shows that the Fermi-level position in these samples undergoes a monotonic decrease as x increases above 3ϫ10 Ϫ3 . Concurrently, ⌽ Bn can reach a value as high as 0.66 eV.…”
mentioning
confidence: 96%