Influence of porosity on the properties of nanostructured tin oxide thin film

Bagga, Shobi; Akhtar, Jamil; Mishra, Sanjeev

doi:10.1088/2053-1591/aadd40

Cited by 8 publications

(1 citation statement)

References 40 publications

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“…The evolution of the packing density is in line with the tendencies observed for the refractive index, i.e., the inner porosity gradually rises between normal and inclined columns. The values of the inner porosities obtained in this work are in agreement with those found in the study of Bagga et al [40], where the porosity of nanostructured SnO2 thin films varied from 23% to 9%. Moreover, the porosity is favored with a higher deposition pressure, whatever the films deposited (normal or inclined columns).…”

Section: Surface Porositysupporting

confidence: 92%

Nanostructuring of SnO2 Thin Films by Associating Glancing Angle Deposition and Sputtering Pressure for Gas Sensing Applications

et al. 2022

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SnO2 thin films were prepared by conventional and Glancing Angle Deposition reactive sputtering, and their gas sensing properties were investigated. The porosity of the as-prepared films was widely assessed using optical methods, and the sensing performances of these active layers were correlated with the evolution of surface and film porosity as a function of deposition conditions and annealing treatment. The sensor made of inclined columns grown at high sputtering pressure (6 ´ 10−3 mbar) and annealed at 500 °C in air exhibited the best response to benzene, with a limit of detection of 30 ppb. In addition, successful BTEX (i.e., benzene, toluene, ethylbenzene, and xylenes) discrimination was achieved by combining the sensing signals of four nanostructured tin-oxide-based gas sensors.

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Section: Surface Porositysupporting

confidence: 92%