Influence of Pulsed Laser Deposition Modes on Properties of Nanocrystalline LiNbO3 Films

Вакулов, З. Е.; Varzarev, Yu. N.; Gusev, E Yu; Skrylev, A. V.; Панич, А. Е.; Miakonkikh, Andrey V.; Klemente, I. E.; Руденко, К. В.; Коноплев, Б. Г.; Агеев, О. А.

doi:10.1134/s1063739719020094

Cited by 7 publications

(4 citation statements)

References 18 publications

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“…Previous work on epitaxial LNO thin films has been performed through different growth techniques, including MBE, [ 7,33 ] sputtering, [ 16,17 ] PLD, [ 10,11,14,34–39 ] LPE, [ 18 ] and MOCVD. [ 8,9,40,41 ] However, the presence of sixfold symmetry in the LNO films resulting from in‐plane twin growth domains has been a long‐term issue.…”

Section: Resultsmentioning

confidence: 99%

Nanocomposite‐Seeded Epitaxial Growth of Single‐Domain Lithium Niobate Thin Films for Surface Acoustic Wave Devices

Paldi

Misra

et al. 2021

Advanced Photonics Research

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Epitaxial lithium niobate (LNO) thin films are an attractive material for devices across a broad range of fields, including optics, acoustics, and electronics. These applications demand high‐quality thin films without in‐plane growth domains to reduce the optical/acoustical losses and optimize efficiency. Twin‐free single‐domain‐like growth has been achieved previously, but it requires specific growth conditions that might be hard to replicate. In this work, a versatile nanocomposite‐seeded approach is demonstrated as an effective approach to grow single‐domain epitaxial lithium niobate thin films. Films are grown through a pulsed laser deposition method and growth conditions are optimized to achieve high‐quality epitaxial film. A comprehensive microstructure characterization is performed and optical properties are measured. A piezoelectric acoustic resonator device is developed to demonstrate the future potential of the nanocomposite‐seeded approach for high‐quality LNO growth for radio frequency (RF) applications.

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Section: Resultsmentioning

confidence: 99%

Nanocomposite‐Seeded Epitaxial Growth of Single‐Domain Lithium Niobate Thin Films for Surface Acoustic Wave Devices

Paldi

Misra

et al. 2021

Advanced Photonics Research

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“…With increasing oxygen pressure from 1 × 10 −5 Torr to 1 × 10 −2 Torr, the average roughness of the obtained films decreasing from 4.75 nm to 4.58 nm. Teardrop-shaped structures on the surface of the obtained films were identified as Nb 2 O 5 [ 52 , 53 ].…”

Section: Resultsmentioning

confidence: 99%

Oxygen Pressure Influence on Properties of Nanocrystalline LiNbO3 Films Grown by Laser Ablation

et al. 2020

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Energy conversion devices draw much attention due to their effective usage of energy and resulting decrease in CO2 emissions, which slows down the global warming processes. Fabrication of energy conversion devices based on ferroelectric and piezoelectric lead-free films is complicated due to the difficulties associated with insufficient elaboration of growth methods. Most ferroelectric and piezoelectric materials (LiNbO3, BaTiO3, etc.) are multi-component oxides, which significantly complicates their integration with micro- and nanoelectronic technology. This paper reports the effect of the oxygen pressure on the properties of nanocrystalline lithium niobate (LiNbO3) films grown by pulsed laser deposition on SiO2/Si structures. We theoretically investigated the mechanisms of LiNbO3 dissociation at various oxygen pressures. The results of x-ray photoelectron spectroscopy study have shown that conditions for the formation of LiNbO3 films are created only at an oxygen pressure of 1 × 10−2 Torr. At low residual pressure (1 × 10−5 Torr), a lack of oxygen in the formed films leads to the formation of niobium oxide (Nb2O5) clusters. The presented theoretical and experimental results provide an enhanced understanding of the nanocrystalline LiNbO3 films growth with target parameters using pulsed laser deposition for the implementation of piezoelectric and photoelectric energy converters.

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“…Pulsed laser deposition (PLD) is mostly used for the growth of complex oxides [ 32 , 33 , 34 , 35 ] and when a particular threshold value of the laser power density is exceeded, stoichiometric growth of films is possible [ 36 ]. However, the physical mechanisms underlying this phenomenon have not yet been clarified [ 37 ].…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric Energy Harvester Based on LiNbO3 Thin Films

et al. 2020

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This paper reports the results of the influence of the energy of laser pulses during laser ablation on the morphology and electro-physical properties of LiNbO3 nanocrystalline films. It is found that increasing laser pulse energy from 180 to 220 mJ results in the concentration of charge carriers in LiNbO3 films decreasing from 8.6 × 1015 to 1.0 × 1013 cm−3, with the mobility of charge carriers increasing from 0.43 to 17.4 cm2/(V·s). In addition, experimental studies of sublayer material effects on the geometric parameters of carbon nanotubes (CNTs) are performed. It is found that the material of the lower electrode has a significant effect on the formation of CNTs. CNTs obtained at the same growth time on a sample with a Cr sublayer have a smaller diameter and a longer length compared to samples with a V sublayer. Based on the obtained results, the architecture of the energy nanogenerator is proposed. The current generated by the nanogenerator is 18 nA under mechanical stress of 600 nN. The obtained piezoelectric nanogenerator parameters are used to estimate the parameters of the hybrid-carbon-nanostructures-based piezoelectric energy converter. Obtained results are promising for the development of efficient energy converters for alternative energy devices based on lead-free ferroelectric films.

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Influence of Pulsed Laser Deposition Modes on Properties of Nanocrystalline LiNbO3 Films

Cited by 7 publications

References 18 publications

Nanocomposite‐Seeded Epitaxial Growth of Single‐Domain Lithium Niobate Thin Films for Surface Acoustic Wave Devices

Nanocomposite‐Seeded Epitaxial Growth of Single‐Domain Lithium Niobate Thin Films for Surface Acoustic Wave Devices

Oxygen Pressure Influence on Properties of Nanocrystalline LiNbO3 Films Grown by Laser Ablation

Piezoelectric Energy Harvester Based on LiNbO3 Thin Films

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