“…Heteroepitaxial growth of III-nitrides on sapphire substrate gives rise to strained films consisting of a high density of defects due to the large mismatch in the lattice and thermal expansion coefficients between the c -plane sapphire substrate and epilayers. Several types of defects have been reported, including threading dislocation, 86 stacking fault, 87 point defect, 88 V-pit, 89,90 trench defects 91 and misfit dislocations. 92 In particular, dislocations and point defects serve as nonradiative recombination centres that introduce the defect levels into the bandgap of III-nitrides and reduce the possibility of radiative recombination by capturing carriers, finally degrading the IQE of LEDs.…”