“…Hydrogenated amorphous carbon (a-C:H), known as diamondlike carbon (DLC), has been extensively studied over the past few decades. [1][2][3][4][5] Benefiting from its unique microstructure consisting of sp 2 -bonded carbon clusters interconnected with sp 3bonded sites, [6,7] DLC film has a series of excellent physical and chemical properties, such as infrared band transparency, high hardness, wear resistance, small friction coefficient, stable chemical properties, corrosion resistance, small thermal expansion coefficient, high thermal conductivity, high resistivity, good optical transparency, biocompatibility, etc., making DLC films an ideal wear-resistant material for optics, [8,9] magnetic memory disks, [10,11] metal tools, [12,13] and biomedical prostheses. [14,15] We divide hydrogenated amorphous carbon into four categories: hydrogenated tetrahedral amorphous carbon film (ta-C:H), the sp 3 content of the ta-C:H film can be up to 70% [16] ; polymer-like films (H-PLC); a-C:H films with the highest hydrogen content (40-50%), which are soft and low density; [17] and diamond-like a-C: H film (H-DLC); this kind of film has medium H content (20-40%).…”