Influence of SiON interlayer on the diamond/GaN heterostructures studied by Raman and SIMS measurements

Rational design of diamond through microstructure engineering: From synthesis to applications

“…Growth SEM Growth rate Surface morphology [38] FIB + EBSD Texture, grain size, 3D growth morphology [39,40] (HR)TEM Epitaxial relationship between diamond and Si [41] EELS The chemical bonding state of carbon (sp 2 /sp 3 ) [ 42] RHEED Diamond nucleation growth process [43] XRD Texture [44] Raman Grain size [45] XPS Distinguish C1s [46] AFM 3D surface texture [47] Phase transition SEM Surface morphology [48] HRTEM Morphology Crystal structure [49] FIB + TEM Different crystal face etched [50] EELS Diffusion of elements [51] XRD Graphite formation Grain size [52,53] Raman Graphite formation [54] XPS Identify diamond (sp 3 C) or graphite (sp 2 C) [55] Thermal management XRD Growth-orientation relationship [56] Raman + SIMS Thermally induced stresses and interface atoms [57] FIB + TEM Interface layer morphology [58] EDX mapping + EELS Interface layer elements [59] TDTR + EBSD Thermal conductivity at grain boundaries [60] Mechanical processing In situ SEM Elastic bending deformation [35] In situ TEM High tensile strengths; fracture surface [61,62] Abbreviations: AFM, atomic force microscope; EBSD, electron backscattered diffraction; EDX mapping, energy-dispersive X-ray spectroscopy mapping; EELS, electron energy loss spectroscopy; FIB, focused ion beam; (HR)TEM, (high-resolution) transmission electron microscope; RHEED, reflection high-energy electron diffraction; SEM, scanning electron microscope; SIMS, secondary ion mass spectroscopy; TDTR, time-domain thermoreflectance; XPS, X-ray photoelectron spectroscopy; XRD, X-ray diffraction.…”

“…Various characterization techniques have been adopted to correlate the microstructures of diamond with their synthesis conditions and properties (Table 1). 35,38–62 …”