Influence of spark plasma sintering and reaction bonded SiC targets on pulsed laser deposition of 6H-SiC thin films

Choutapalli, Sree Harsha; Kumar, H.G. Prashantha; Paneerselvam, Emmanuel; Vasa, Nilesh J.; Jayaganthan, R.

doi:10.1007/s00339-022-06166-9

Cited by 2 publications

(1 citation statement)

References 17 publications

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“…The main sintering methods of SiC ceramics are pressureless sintering [ 11 , 12 , 13 ] and reaction sintering [ 14 , 15 ], but the two sintering have low purity. To avoid these drawbacks, researchers have developed the hot pressing sintering method [ 9 , 16 , 17 ], spark plasma sintering [ 18 , 19 , 20 ], microwave sintering [ 21 ], hot isostatic sintering [ 22 ], and so on. Each of these techniques offers its own set of advantages and disadvantages, with numerous valuable research findings to support their efficacy.…”

Section: Introductionmentioning

confidence: 99%

Microstructure and Properties of Hot Pressing Sintered SiC/Y3Al5O12 Composite Ceramics for Dry Gas Seals

Zou,

Ou,

Zhou

et al. 2024

Materials

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Silicon carbide (SiC) ceramics with high bending strength were prepared by hot pressing sintering (HPS) with yttrium aluminum garnet (Y3Al5O12, YAG) as sintering additive, and the effects of YAG content and sintering temperature on the sintering behavior, microstructure and mechanical properties of SiC ceramics were investigated in detail. The uniform distribution of YAG to form a liquid phase and the driving force provided by hot pressing sintering decrease the sintering temperature, improve the densification of SiC ceramics, and refine the crystal size. By means of suitable sintering conditions with the additional amount of YAG of 5 wt%, the sintering temperature of 1950 °C and a pressure of 30 MPa, the resultant SiC/YAG composite ceramics possesses high sintering and mechanical properties with the relative density of 98.53%, the bending strength of 675 MPa, the Vickers hardness of up to 17.92 GPa, and the elastic modulus of 386 GPa. The as-prepared SiC/YAG composite ceramics are promisingly used as the dry gas seal materials in the centrifugal compressors.

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Section: Introductionmentioning

confidence: 99%

Microstructure and Properties of Hot Pressing Sintered SiC/Y3Al5O12 Composite Ceramics for Dry Gas Seals

Zou,

Ou,

Zhou

et al. 2024

Materials

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Influence of irradiation wavelength during laser-assisted doping of 4H-silicon carbide in liquid phase

Choutapalli,

H G,

Nakamura

et al. 2024

Journal of Micromanufacturing

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Laser-assisted doping of silicon carbide (SiC) substrates is challenging due to the low diffusion coefficient of dopant atoms and the chemically inert nature of SiC. Single crystal intrinsic 4H-SiC substrate is irradiated with neodymium-doped yttrium aluminium garnet (Nd3+):YAG laser with wavelengths of 1064, 355 and 266 nm, and krypton fluoride (KrF) excimer laser with the wavelength of 248 nm under liquid phase dopant sources. Different liquid solutions were used as dopant sources for aluminium (Al) and phosphorus (P). SiC was transparent to 1064 and 355 nm due to low absorption coefficients, while 266 and 248 nm showed better coupling due to higher absorption coefficients and led to the diffusion of atoms. The electrical resistance of the substrates was measured to be lower than 1000 kΩ after diffusion. Dispersive X-ray spectroscopy (EDS) studies showed that both laser wavelengths of 248 nm and 266 nm resulted in doping of Al and P, with the surface concentrations ranging from 0.5 to 1.5 at.% and from 0.24 to 0.6 at.%, respectively. Two-dimensional thermo-temporal simulation of the laser pulse interaction in the liquid phase revealed that unlike in air, during irradiation with 266 nm laser under liquid, the surface temperature of the substrate was slightly lower. However, the subsurface temperature increased along the depth by a few microns. Similarly, simulation studies with longer pulse irradiation also show that high temperature was maintained for a longer time, indicating improved dopant diffusion into the 4H-SiC substrate.

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Influence of spark plasma sintering and reaction bonded SiC targets on pulsed laser deposition of 6H-SiC thin films

Cited by 2 publications

References 17 publications

Microstructure and Properties of Hot Pressing Sintered SiC/Y3Al5O12 Composite Ceramics for Dry Gas Seals

Microstructure and Properties of Hot Pressing Sintered SiC/Y3Al5O12 Composite Ceramics for Dry Gas Seals

Influence of irradiation wavelength during laser-assisted doping of 4H-silicon carbide in liquid phase

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