2007
DOI: 10.1109/tuffc.2007.313
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Influence of surface roughness of Bragg reflectors on resonance characteristics of solidly-mounted resonators

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Cited by 26 publications
(13 citation statements)
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“…The AFM image of the molybdenum film surface with a minimum surface roughness is presented in Fig.1. The obtained surface roughness of the molybdenum films is less 5-6 times than one presented in [4]. The surface roughness of aluminum films prepared by magnetron sputtering of an aluminum target (purity 99.99%) was worse than that of molybdenum (Fig.…”
Section: Layersmentioning
confidence: 62%
See 1 more Smart Citation
“…The AFM image of the molybdenum film surface with a minimum surface roughness is presented in Fig.1. The obtained surface roughness of the molybdenum films is less 5-6 times than one presented in [4]. The surface roughness of aluminum films prepared by magnetron sputtering of an aluminum target (purity 99.99%) was worse than that of molybdenum (Fig.…”
Section: Layersmentioning
confidence: 62%
“…Increasing the thickness of Bragg reflector structure leads to increasing the surface roughness of the films. In its turn, the surface roughness of the films influences on scattering of BAW and correct operation of the Bragg reflector [4]. Therefore, the fabrication of the Bragg reflector with a minimal surface roughness of thin-film layers is an important problem in the technology of thin-film microwave BAW-SMR.…”
Section: Introductionmentioning
confidence: 99%
“…As to the fabrication of the Bragg reflector, the roughness of each constituent layer has great influence on the frequency response of SMR devices [15]. Firstly, Mo and SiO 2 are deposited and the deposition parameters are adjusted in accordance with the AFM results.…”
Section: Resultsmentioning
confidence: 99%
“…4. The smooth and clear interfaces of a Bragg reflector are important criteria for SMR devices [15].…”
Section: Resultsmentioning
confidence: 99%
“…Thickness variations [5] and attenuations in the periodic structure lead to damped parasitic resonances, while the input impedance of the backing is lowered in the frequency range of the piezoelectric resonance (Fig. 10).…”
Section: C2 Electrical Impedancementioning
confidence: 99%