In this study, the density and oxygen content of Mo thin films were varied by changing the deposition conditions, in order to understand their influence on the catalytic activity of Mo 2 C for the synthesis of multi-layer graphene (MLG). Structural and morphological analysis of Mo 2 C in relation to its catalytic activity indicate that the density of Mo plays a more critical role on MLG synthesis than the oxygen content. Results show that the pinholes present in relatively low density Mo layers act as catalytically active defect sites, promoting MLG synthesis.
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