2018
DOI: 10.1007/s12633-018-9840-1
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Influence of Ta2O5 Interfacial Oxide Layer Thickness on Electronic Parameters of Al/Ta2O5/p-Si/Al Heterostructure

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Cited by 9 publications
(5 citation statements)
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“…Among these, the RF sputtering technique has been widely used to obtain non-stoichiometric NiO x films due to its industrial scalability, that is, the properties of the films have been controlled by changing sputtering conditions like substrate temperature, O 2 flow rate and RF power [9,19]. With respect to our previously published paper [20] and to the studies reported in the literature [2123], in this work, we investigated the effect of the thickness of NiO x films on the electrical properties of Ni/p-NiO x /n-Si devices. Accordingly, changes in diode parameters as a result of film thickness were discussed correlating the structural and morphological characteristics of the films with the electrical properties.…”
Section: Introductionmentioning
confidence: 99%
“…Among these, the RF sputtering technique has been widely used to obtain non-stoichiometric NiO x films due to its industrial scalability, that is, the properties of the films have been controlled by changing sputtering conditions like substrate temperature, O 2 flow rate and RF power [9,19]. With respect to our previously published paper [20] and to the studies reported in the literature [2123], in this work, we investigated the effect of the thickness of NiO x films on the electrical properties of Ni/p-NiO x /n-Si devices. Accordingly, changes in diode parameters as a result of film thickness were discussed correlating the structural and morphological characteristics of the films with the electrical properties.…”
Section: Introductionmentioning
confidence: 99%
“…Gupta and Yakuphanoğlu [16] informed that n and BH of Al/In 2 O 3 /p-Si juntion were determined to be 1.07 and 0.72 eV, respectively. Reddy et al [17] have found that the values of BH and n for Al/Ta 2 O 5 /p-Si junctions with varying the thickness of Ta 2 O 5 layer between 20 nm and 60 nm are 0.58 eV, 2.35, 0.71 eV, 2.10 and 0.78 eV, 1.87 for 20, 40 and 60 nm, respectively. Mohan et al [18] obtained that the BH and n values were 0.911 eV and 2.120 in dark for the Al/Yb 2 O 3 :Cu/p-Si contact having Cu dopant density of 4.5 wt% in Yb 2 O 3 layer.…”
Section: Cheung Functionsmentioning
confidence: 99%
“…The BH modification occupies a huge research field in semiconductor device electronics. Many studies have been performed by using the different oxide interlayers in the MS diodes [14][15][16][17][18][19][20][21][22]. According to table 2, the diode quantities of Al/CrO 3 /p-Si contact are compared with those of other oxide/p-Si devices described below [14][15][16][17][18][19][20].…”
Section: Cheung Functionsmentioning
confidence: 99%
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