“…To begin with, nitride-based compounds, such as TiN, ZrN, CrN, and TiAlN, have been suggested as hard coatings for surface modification, surface barriers, or electrodes [25][26][27][28][29][30] ]. In order to combine superior mechanical properties, e.g., hardness and adhesion to the substrate, with enhanced corrosion resistance, new compounds, such as oxynitrides, of the transitional metals with low oxygen content have been developed [31][32][33][34][35] due to their superior chemical stability, notable optical, electronic, and mechanical properties [36][37][38], with superior mechanical properties compared to those reported for the oxides [39][40][41][42]. The interest in titanium oxynitride films is due to the pronounced dependence of the oxynitrides properties on the N/O ratio [33,34,[43][44][45][46][47].…”