2007
DOI: 10.1016/j.sna.2006.09.008
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Influence of the Casimir force on the pull-in parameters of silicon based electrostatic torsional actuators

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Cited by 79 publications
(36 citation statements)
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“…The Casimir and the van der Waals attractions are the most important forces which act at the dimensions of N/MEMS [5]. Emission of retarded electromagnetic waves in the separations less than few micrometers makes an intermolecular force, known as the Casimir force [6]. The van der Waals force acts in the shorter distance range compared to the Casimir force which is more considerable in nanoscale [6].…”
Section: Introductionmentioning
confidence: 99%
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“…The Casimir and the van der Waals attractions are the most important forces which act at the dimensions of N/MEMS [5]. Emission of retarded electromagnetic waves in the separations less than few micrometers makes an intermolecular force, known as the Casimir force [6]. The van der Waals force acts in the shorter distance range compared to the Casimir force which is more considerable in nanoscale [6].…”
Section: Introductionmentioning
confidence: 99%
“…Emission of retarded electromagnetic waves in the separations less than few micrometers makes an intermolecular force, known as the Casimir force [6]. The van der Waals force acts in the shorter distance range compared to the Casimir force which is more considerable in nanoscale [6]. The Casimir force plays a vital role in N/MEMS design [7] inasmuch as neglecting this effect in designing N/MEMS may lead to the collapse condition of the structure without applying any external voltage [8].…”
Section: Introductionmentioning
confidence: 99%
“…VdW force is the interaction force between neutral atoms and it differs from covalent and ionic bondings in that it is caused by correlations in the fluctuating polarizations of nearby particles (Xie 2009 of retarded electromagnetic waves, whose distance ranges from a few nanometers up to a few micrometers (Gusso and Delben 2007). An important feature of the Casimir effect is that even though it is quantum in nature, it predicts a force between macroscopic bodies (Bordag et al 2001).…”
Section: Introductionmentioning
confidence: 99%
“…And they always exist between two objects close to each other. The influence of vdW and Casimir forces on the stability of the MEMS and NEMS actuators with suspended structures has been extensively reported in many literatures [6][7][8][9][10][11][12][13][14][15][16][17][18][19]. Chan et al [10] showed that Casimir force can be used to actuate the NEMS devices under certain condition.…”
Section: Introductionmentioning
confidence: 99%
“…The influence of vdW force on dynamic stability of an electrostatic torsional NEMS actuator was also studied [17], and the bifurcation behaviors were analyzed. Gusso and Delben [18] performed a theoretical analysis focusing on the effect of the Casimir force on the pull-in parameters of electrostatic torsional actuators made from silicon. Ramezani and coworkers [19] investigated the two-point boundary value problem (BVP) of the nano-cantilever deflection subjected to Casimir and electrostatic forces, and derived the instability point of the nanobeam by using analytical and numerical methods.…”
Section: Introductionmentioning
confidence: 99%