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We perform a theoretical analysis of a setup intended to measure the repulsive (outward) Casimir forces predicted to exist inside of perfectly conducting rectangular cavities. We consider the roles of the conductivity of the real metals, of the temperature and surface roughness. The possible use of this repulsive force to reduce friction and wear in micro and nanoelectromechanical systems (MEMS and NEMS) is also considered.

The dispersion (van der Waals and Casimir) force between two semi-spaces are calculated using the Lifshitz theory for different materials relevant for micro and nanodevices fabrication, namely, gold, silicon, gallium arsenide, diamond and two types of diamond-like carbon (DLC), silicon carbide, silicon nitride and silicon dioxide. The calculations were performed using recent experimental optical data available in the literature, usually ranging from the far infrared up to the extreme ultraviolet bands of the electromagnetic spectrum. The results are presented in the form of a correction factor to the Casimir force predicted between perfect conductors, for the separation between the semi-spaces varying from 1 nm up to 1 µm. The relative importance of the contributions to the dispersion force of the optical properties in different spectral ranges is analyzed. The role of the temperature for semiconductors and insulators is also addressed. The results are meant to be useful for the estimation of the impact of the Casimir and van der Waals forces on the operational parameters of micro and nanodevices.

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