“…In general, amorphous silicon films (a-Si:H) grown by plasma enhanced chemical vapor deposition (PECVD) technique show a reduced light-induced degradation, an improved reproducibility and a better film thickness uniformity. Besides, a-Si:H is an inexpensive thin-film semiconductor, widely used in UV sensor, color and gas sensors, large-area electronics, photovoltaics and imaging applications [4][5][6][7]. Even though PS plays an important role for the development of gas sensor, insufficient awareness exists on oxygen gas and water vapor sensing properties especially, using nanoporous/amorphous-silicon heterojunction by PECVD technique.…”