A new approach to Brownian motion of atomic clusters on solid surfaces is developed. The main topic discussed is the dependence of the diffusion coefficient on the fit between the surface static potential and the internal cluster configuration. It is shown this dependence is non-monotonous, which is the essence of the so-called resonant diffusion. Assuming quicker inner motion of the cluster than its translation, adiabatic separation of these variables is possible and a relatively simple expression for the diffusion coefficient is obtained. In this way, the role of cluster vibrations is accounted for, thus leading to a more complex resonance in the cluster surface mobility.The Brownian motion of atoms and atomic clusters on solid surfaces [1] is of interest for both the pure science and technology. It is relevant to surface coating [2], heterogeneous nucleation [3], catalysis [4], etc. [5]. Nowadays it is realized that the diffusion coefficient of homologies in solids exhibit non-monotone dependence on the molecular size. This phenomenon, called resonant diffusion, has been quantitatively described [6]. The problem here is, if there are resonant effects at the Brownian motion of atomic clusters on solid surfaces. Indeed, similar behavior was experimentally observed for diffusion of Re dimers on tungsten [1], Rh clusters on rhenium [7], etc. Despite the existing theoretical explanations [8,9], a proper adoption of modern methods for treatment of Brownian motion in modulated structures [10][11][12][13][14][15][16] to this important specific problem is required. The basic goal of this paper is to demonstrate a theoretical procedure for description of the resonant diffusion on solid surfaces.The main tool employed here is a formula derived by Festa and d'Agliano [17] providing possibility to calculate the diffusion coefficient D of a particle moving into a periodic potentialwhere U is the periodic potential with a period a and 1 / kT is the reciprocal thermal energy. Strictly speaking, this formula is valid for the overdamped limit only. However, since we are interested in the large time behavior of the Brownian particle, this condition is always fulfilled. The first problem in the application of Eq. (1) is to determine the friction coefficient B . In the frames of the classical statistical mechanics it is possible to obtain a relation between the static potential on the solid surface U and the friction coefficient [13,15]