Influence of Thermal Process on Physical Properties of ZnO Films Prepared by Spray Pyrolysis

Abstract

ZnO lms were deposited on glass substrates by ultrasonic spray pyrolysis technique at a substrate temperature of 300 ± 5• C. All of the lms have been annealed at 500• C temperature for dierent time (1, 2, and 3 h) to improve the optical, electrical and surface properties. The eect of annealing time on the lms of physical properties has been investigated. UV-Vis spectrophotometer has been used for transmittance measurements. Also, band gap values of the lms have been determined by optical method. Atomic force microscopy has been used to have information the surface morphology and roughness values of the lms. Thicknesses, refractive index and extinction coecient values of the lms have been determined by spectroscopic ellipsometry technique. The electrical conduction mechanisms and resistivity of the lms were investigated using two probe technique. After all the investigations it was concluded that annealing time has a dramatic eect especially on the surface, optical properties and electrical resistivity values of ZnO lms. From the results of these investigations, the application potential of the lms for solar cell devices as transparent electrode was searched.

Perlakuan Panas Ganda pada Fabrikasi Film Tipis AZO Nanokristal dengan Teknik Spray : Studi XRD [Double Heat Treatments On The Fabrication Of Nanocrystalline Azo Thin Films By Spray Technique: XRD Studies]

“…Film tipis ZnO maupun ZnO doping telah dideposisikan dengan berbagai macam teknik, seperti sputtering [5][6][7] , MBE (molecular beam epitaxy) [8] , CVD (chemical vapor deposition) [9] , MOCVD (metal organic chemical vapor deposition) [4] , electrochemical deposition [10] , pulsed laser deposition [11] , sol-gel [12][13] dan spray [12,[14][15][16][17][18] . Dibandingkan dengan teknik lain, spray merupakan teknik yang sederhana, tidakvakum dan murah [17] .…”

“…Peningkatan suhu perlakuan panas dalam lingkungan udara menunjukkan peningkatan pada struktur film tipis ZnO yang berakibat pada peningkatan sifat optiknya [12] . Studi lain oleh Gencyilmaz et al [16] menunjukkan bahwa waktu pada perlakuan panas mempunyai efek yang signifikan terhadap surface morfologi, sifat optik dan sifat listrik dari film tipis ZnO. Joseph et al [14] dalam studinya melakukan perlakuan panas dalam lingkungan vakum (10 -5 mbar) untuk meningkatkan struktur dan sifat listrik dari film tipis ZnO.…”