2009
DOI: 10.3952/lithjphys.49107
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Influence of torch power and Ar/C2H2ratio on structure of amorphous carbon films

Abstract: The amorphous hydrogenated carbon films (a-C:H) were formed on the stainless steel substrates from an argon-acetylene gas mixture at atmospheric pressure using a direct current plasma torch discharge. The carbon films were deposited using Ar/C2H2 gas volume ratios 100:1, 150:1, and 200:1 and plasma torch power of 600 and 870 W. It has been obtained that the increase of the torch power leads to higher film growth rate and increases surface roughness. The growth rate varies from 20 up to 425 nm/s depending on th… Show more

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Cited by 3 publications
(2 citation statements)
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“…18 The relative ratio of the D peak to G peak (Table 1) is higher compared to typical diamond-like carbon films and shows that the relative fraction of sp 2 sites is higher than that of sp 3 sites. 19 Concerning argon effect on amorphous hydrogenated carbon structure, Tomasella et al 20 have denoted an increase in graphitisation when this carrier gas was employed.…”
Section: Raman Spectroscopymentioning
confidence: 99%
“…18 The relative ratio of the D peak to G peak (Table 1) is higher compared to typical diamond-like carbon films and shows that the relative fraction of sp 2 sites is higher than that of sp 3 sites. 19 Concerning argon effect on amorphous hydrogenated carbon structure, Tomasella et al 20 have denoted an increase in graphitisation when this carrier gas was employed.…”
Section: Raman Spectroscopymentioning
confidence: 99%
“…More details about the * corresponding author; e-mail: zydrunas@mail.lei.lt plasma torch and deposition process can be found elsewhere [7]. Argon (Ar) was used as the plasma working gas with a flow rate of 6.6 l/min.…”
Section: Methodsmentioning
confidence: 99%