1981
DOI: 10.1002/pssa.2210630254
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Influence of ultrasound on ionic diffusion process in semiconductors

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1983
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Cited by 21 publications
(9 citation statements)
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“…US influence on crystal point defects was studied for the first time in papers [52][53][54]. Thus, effect of the US decrease of diffusion activation energy and accordingly the increase of diffusion of Li [52] and Cr [53] ions were observed in pollycrystalline silicon. In monocrystal silicon an alkaloid metal K and Na migration stimulated by US from volume to surface was shown in [39].…”
Section: Practical Perspective Of Us Treatment Utilizationmentioning
confidence: 99%
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“…US influence on crystal point defects was studied for the first time in papers [52][53][54]. Thus, effect of the US decrease of diffusion activation energy and accordingly the increase of diffusion of Li [52] and Cr [53] ions were observed in pollycrystalline silicon. In monocrystal silicon an alkaloid metal K and Na migration stimulated by US from volume to surface was shown in [39].…”
Section: Practical Perspective Of Us Treatment Utilizationmentioning
confidence: 99%
“…The results, obtained in [4,25,[50][51][52][53][54][55][56] which applied to US influence on parameters of semiconductor devices, are summarize in Table. Results A considered aspect of physical and technological effects of active ultrasound in semiconductors is proposed for further usage in Sensor electronics:…”
Section: Practical Perspective Of Us Treatment Utilizationmentioning
confidence: 99%
“…Impurity levels affect the TP-transitions because, as in massive semiconductors, they can act as intermediate virtual states [7]. TP-ionization of impurity centers described in the model of zero-radius potential was considered in [8] for the case of a 2D-system simulated by the "hard-wall" potential.…”
Section: Introductionmentioning
confidence: 99%
“…Paper [6] devoted to the study of the influence of relatively weak US on impurity atom migration assumes that the system of impurity atoms is an equilibrium bath with respect to the phonon subsystem which is removed from the equilibrium state. The impurity atoms absorb the energy of nonequilibrium phonons, and this energy is identified with a decrease I ) Prospekt Nauki 47, 252 028 Kiev, Ukraine.…”
Section: Introductionmentioning
confidence: 99%