High-moment soft magnetic Fe 65 Co 35 thin films with well in-plane uniaxial anisotropy were obtained by cosputtering on Co 93 Fe 7 , Ni 80 Fe 20 , Cu and Fe underlayers. The single-layer Fe 65 Co 35 film with thickness of 100 nm shows a magnetic anisotropy. The coercivity along easy axis H ce and that along hard axis H ch are equal to 3.3 kA/m and 2.1 kA/m, respectively. The soft magnetic properties of Fe 65 Co 35 films were much improved by using an underlayer. The H ce and H ch of Fe 65 Co 35 films with Ni 80 Fe 20 , Co 93 Fe 7 and Cu underlayers can be reduced to 0.9 -1.1 kA/m and 0.08 -0.20 kA/m, respectively. For films with Fe underlayer, the H ce and H ch reduced to 1.1 kA/m and 0.6 kA/m, respectively. In the case of Co 93 Fe 7 , Ni 80 Fe 20 and Fe underlayers, the coercivity of films did not depend remarkably on the thickness t of underlayer at t > 1 nm. While in the case of Cu underlayer, the coercivity of films changed remarkably with increasing underlayer thickness. It was shown that the texture of double-layered underlayer/Fe 65 Co 35 films is dependent on the material and the thickness of underlayer. The influence of the underlayer on the surface morphology and micro-magnetic structure of films were investigated by AFM and MFM. It was suggested that the modification of the structure of Fe 65 Co 35 films by using an underlayer is an important way to improve their soft magnetic properties.