The surface layers formed in LiNbO 3 waveguides, fabricated by Zn diffusion from the vapor phase, have been investigated by time of flight elastic recoil detection analysis using 127 I ions. The key features of this technique, simultaneous profiling of all ions and a depth of analysis Ͻ1 m, have allowed a detailed and quantitative characterization of the surface layers. The Zn diffusion into LiNbO 3 can be understood as a 2Li↔Zn exchange process. As a consequence, an outermost layer of several hundreds of nanometers is formed, consisting of LiNbO 3 and ZnNb 2 O 6 phases showing complementary profiles. A good correlation has been found between the composition profiles and the optical waveguiding behavior. After thermal annealing of the waveguides, a thinner layer containing a uniform mixture of ZnO and LiNbO 3 is generated followed by a transition to a graded solid solution of Zn into LiNbO 3 . © 2002 American Institute of Physics. ͓DOI: 10.1063/1.1506405͔ Different methods are available for the fabrication of good-quality low-loss waveguides in LiNbO 3 . In particular, Ti diffusion, performed at 900-1100°C, has been commercially implemented for many years for the fabrication of a variety of integrated optics devices. 1 Unfortunately, optical damage ͑photorefractive effect͒ severely impairs the use of these waveguides for high-power density applications such as lasers and nonlinear optical devices in the visible range. Several alternatives to Ti diffusion have been put forward and are being developed. One promising approach is Zn diffusion from the vapor phase, 2 from a ZnO source, 3 or by liquid-phase epitaxy. 4 In the first procedure, the diffusion temperature is much lower ͑550-800°C͒ than that for Ti diffusion and therefore it is free of many problems derived from the high temperature processing. The Zn-doped material presents good crystallinity, transparency, 5 and resistance to laser damage. 6 At the same time, they preserve the high electrooptic coefficients 7 and the ferroelectric domain structure of the LiNbO 3 substrate. 8 The fabrication process involves two steps: the diffusion of Zn from the vapor phase at 500-700°C, followed by an annealing step performed at 800-900°C. Some laser and nonlinear optical devices have been already implemented on Zn-doped waveguides. 9,10 However, the physical characterization of the waveguides is still defficient. Optical experiments have suggested the formation of a multilayer structure with a thin low-index film at the surface, 11 although a direct experimental confirmation is lacking. In fact, the techniques used so far are either insensitive to these surface layers or not quantitative enough to provide a detailed and reliable picture.The purpose of this work has been to apply the potential of the time of flight elastic recoil detection analysis ͑TOF-ERDA͒ method 12 using heavy 127 I ions to determine the near-surface profiles of all relevant atom species. The main advantage of this technique is that the information for all elements is retrieved in the same experimen...