Master data refers to the data that represents the core business of the organization, shared among different applications, departments, and organizations and most valued as the important asset to the organization. Despite the outward benefit of master data mainly in decision making and organization performance, the quality of master data is at risk. This is due to the critical challenges in managing master data quality the organization may expose. Hence the primary aim of this study is to identify factors influencing master data quality from the lens of total quality management while adopting the systematic literature review method. The study proposed 19 factors that inhibit the quality of master data namely data governance, information system, data quality policy and standard, data quality assessment, integration, continuous improvement, teamwork, data quality vision and strategy, understanding of the systems and data quality, data architecture management, personnel competency, top management support, business driver, legislation, information security management, training, change management, customer focus, and data supplier management that can be categorized to five components which are organizational, managerial, stakeholder, technological, and external. Another important finding is the identification of the differences for factors influencing master data compared to other data domain which are business driver, organizational structure, organizational culture, performance evaluation and rewards, evaluate cost/benefit tradeoffs, physical environment, risk management, storage management, usage of data, internal control, input control, staff participation, middle management's commitment, the role of data quality and data quality manager, audit, and personnel relation. It is expected that the findings of this study will contribute to a deeper understanding of the factors that will lead to an improved master data quality.