Infrared detection of gaseous species during the filament-assisted growth of diamond

Celii, F. G.; Pehrsson, Pehr E.; Wang, H.‐t.; Butler, James E.

doi:10.1063/1.99575

Cited by 246 publications

(59 citation statements)

References 29 publications

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“…There have been many studies of the gas-phase chemistry during diamond CVD [58][59][60][61][62][63][64][65][66][67][68]. These investigations revealed that atomic hydrogen and hydrocarbon are perhaps the most critical determinants of CVD diamond as well as its quality and growth rate.…”

Section: The Gas-phase Chemical Environmentmentioning

confidence: 99%

“…The first hydrocarbon concentration measurements during diamond growth were made by Celii et al [58], who used infrared diode laser absorption spectroscopy to detect acetylene (C 2 H 2 ), the methyl radical (CH 3 ) and ethylene (C 2 H 4 ) in a 3.3 kPa hot-filament reactor with an input gas of 0.5% methane in hydrogen. Later, a similar measurement was also made for a 2.7 kPa microwave system [72].…”

Section: Hydrocarbon Chemistrymentioning

confidence: 99%

See 1 more Smart Citation

Diamond growth by chemical vapour deposition

Grácio¹,

Fan²,

Madaleno³

2010

J. Phys. D: Appl. Phys.

255

156

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This paper reviews the growth of diamond by chemical vapour deposition (CVD). It includes the following seven parts: (1) Properties of diamond: this part briefly introduces the unique properties of diamond and their origin and lists some of the most common diamond applications. (2) Growth of diamond by CVD: this part reviews the history and the methods of growing CVD diamond. (3) Mechanisms of CVD diamond growth: this part discusses the current understanding on the growth of metastable diamond from the vapour phase. (4) Characterization of CVD diamond: we discuss the two most common techniques, Raman and XRD, which have been intensively employed for characterizing CVD diamond. (5) CVD diamond growth characteristics: this part demonstrates the characteristics of diamond nucleation and growth on various types of substrate materials. (6) Nanocrystalline diamond: in this section, we present an introduction to the growth mechanisms of nanocrystalline diamond and discuss their Raman features. This paper provides necessary information for those who are starting to work in the field of CVD diamond, as well as for those who need a relatively complete picture of the growth of CVD diamond.

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Section: The Gas-phase Chemical Environmentmentioning

confidence: 99%

Section: Hydrocarbon Chemistrymentioning

confidence: 99%

Diamond growth by chemical vapour deposition

Grácio¹,

Fan²,

Madaleno³

2010

J. Phys. D: Appl. Phys.

255

156

View full text Add to dashboard Cite

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“…Quenching coefficients for a variety of collision partners have been measured in a previous study.' 0 With this technique, quantitative concentration profiles of atomic hydrogen have been measured in a low pressure hydrogen environment in conditions typically found in diamond growth experiments 2 : filament temperatures between 2000 and 2500 K; distances from the filament up to 28 mm, and pressures of 1.5-100 mbar with up to 5% CH 4 . The H-atom concentrations were determined as a function of several important parameters as filament temperature, material, diameter, and overall pressure.…”

Section: Introductionmentioning

confidence: 99%

“…To date, only a limited number of investigations provide this kind of information. Infrared absorption spectroscopy 4 and mass spectrometry photon ionization (REMPI). 6 Although this study has provided radial profiles of H atom REMPI signals, it is not clear how the measured profiles correspond to absolute concentrations of atomic hydrogen.…”

Section: Introductionmentioning

confidence: 99%

Two-photon excited LIF determination of H-atom concentrations near a heated filament in a low pressure H_2 environment

Meier¹,

Kohse‐Höinghaus²,

Schäfer

et al. 1990

Appl. Opt.

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With respect to the investigation of low pressure filament-assisted chemical vapor deposition processes for diamond formation, absolute concentrations of atomic hydrogen were determined by two-photon laserinduced fluorescence in the vicinity of a heated filament in an environment containing H. or mixtures of H. and CH 4 . Radial H concentration profiles were obtained for different pressures and filament temperatures, diameters, and materials. The influence of the addition of various amounts of methane on the H atom concentrations was examined. Keywords: Two-photon laser-induced fluorescence, atomic hydrogen, quantitative concentration measurements, hot filament CVD of diamond.

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“…[31-331 Therefore, starting with the first report in 1988 [34] on infrared detection of CH3 during filament-assisted growth of diamond, several techniques has been applied to monitor methyl radicals in a CVD reactor, including REMPI spectroscopy [35-391, UV absorption spectroscopy [40,411, and mass spectrometry [42]. These techniques, however, can be intrusive (as in the case of REMPI) and of limited spatial resolution (mass spectroscopy) and sensitivity (absorption).…”

Section: Cavity Ring-down Spectroscopy (Crds)mentioning

confidence: 99%

Nonequilibrium in Thermal Plasmas with Applications to Diamond Synthesis

et al. 1997

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-Atmospheric pressure plasmas are frequently considered to be in local thermodynamic equilibrium due to the high frequency of collisional processes which drive the plasma state towards a Maxwell-Boltzmann equilibrium. However, various forms of thermodynamic, ionizational, and chemical nonequilibrium have been demonstrated and investigated in atmospheric pressure plasma environments over the last several years, and the nonequilibrium behavior of such systems can be quite significant. The investigation, understanding, and exploitation of atmospheric pressure nonequilibrium plasma chemistry is necessary to the further expansion of plasma-based systems into mainstream manufacturing and processing applications. Several experimental programs to investigate the fundamental processes of atmospheric pressure nonequilibrium plasma chemistry, and the application of this nonequilibrium to various chemical systems have been undertaken in our laboratories. The results of these investigations have shed light on the kinetics behind various forms of atmospheric pressure nonequilibrium chemistry, and provided insights into the beneficial control of nonequilibrium plasma chemistry for processing applications.

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Infrared detection of gaseous species during the filament-assisted growth of diamond

Cited by 246 publications

References 29 publications

Diamond growth by chemical vapour deposition

Diamond growth by chemical vapour deposition

Two-photon excited LIF determination of H-atom concentrations near a heated filament in a low pressure H_2 environment

Nonequilibrium in Thermal Plasmas with Applications to Diamond Synthesis

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