“…Silicon isotope-selective MPD of compounds containing single silicon atoms, such as SiH 2 F 2 (15), SiF 3 C 6 H 5 (16)(17)(18), SiF 3 CH 3 (19,20), SiF 3 CHCH 2 (21) and Si(OCH 3 ) 4 (22) was studied previously. The maximum isotope selectivities reached for the MPD of these molecules were found to be lower than that for Si 2 F 6 .…”