“…13,[17][18][19][20][21][22] In addition to the spatial resolution, the probing depth of s-SNOM of about 100 nm 21,23-26 presents a major advantage for the investigation of small volumes or thin film samples, allowing for IR thin film spectroscopy with negligible direct substrate contribution to the optical signal. 27 The signal strength of s-SNOM is greatly enhanced via polaritoninduced resonant tip-sample interaction, 12,17,27,[30][31][32][34][35][36][37][38][39][40][41][42][43][44][45] which is of special advantage when exploring technically challenging wavelength regimes, 17,45 such as the "THz gap" (30-300 lm, i.e., 1-10 THz). 46 Particularly, sample-resonant s-SNOM provides enhanced sensitivity to the smallest material variations such as doping level and charge carrier concentration, 22,36,39,47 optical anisotropy tensor orientation in ferroelectric materials, 30,31,40,48 polymorphism, 36 and local stress distribution.…”