“…The high temperatures used indicate that a large number of silicon-containing species may be involved, including silicon oxyhalides and compounds containing multiple silicon atoms. − In contrast with silane oxidation/combustion, which has been extensively studied, very little is known about the thermochemistry and kinetics of species involved in SiCl 4 oxidation. Thermodynamic data (heats of formation, entropies, and heat capacities) for silicon oxyhalides are almost totally unavailable; in the Si−O−Cl system of monomeric silicon compounds, only two oxychloride species have been characterized: ClSiO , and Cl 2 SiO. − Reaction rates relevant to SiCl 4 oxidation in the literature largely concern either qualitative observations or global reaction rates. ,− Several investigations of the pyrolysis of chlorinated silanes have recently appeared, − however, and reaction rates of SiCl 2 and SiCl 3 with molecular oxygen have been reported. The overall lack of information represents a major barrier to the construction of mechanisms composed of elementary chemical reactions.…”